[1]
|
莫喜先. 磁驱动纳米定位平台时滞控制方法及实验[D]. 上海: 上海交通大学, 2019.MO X X. Retarded control method and experiments on magnet-driven nanopositioning stage[D]. Shanghai: Shanghai Jiao Tong University, 2019. (in Chinese)
|
[2]
|
贺云波, 曾志强, 张昌. 迭代学习在音圈电机轨迹跟踪中的应用研究[J]. 机械设计与制造, 2020(4): 258-261.HE Y B, ZENG Z Q, ZHANG C. Study on the application of iterative learning in the trajectory tracking of voice coil motor[J]. Machinery Design & Manufacture, 2020(4): 258-261. (in Chinese)
|
[3]
|
王福超, 王昱棠, 田大鹏. 音圈快速反射镜的完全跟踪控制[J]. 光学精密工程, 2020, 28(9): 1997-2006.WANG F C, WANG Y T, TIAN D P. Perfect tracking control for fast-steering mirror driven by voice coil motor[J]. Optics and Precision Engineering, 2020, 28(9): 1997-2006. (in Chinese)
|
[4]
|
PARMAR G, BARTON K, AWTAR S. Large dynamic range nanopositioning using iterative learning control[J]. Precision Engineering, 2014, 38(1): 48-56. doi: 10.1016/j.precisioneng.2013.07.003
|
[5]
|
ITO S, TROPPMAIR S, LINDNER B, et al. Long-range fast nanopositioner using nonlinearities of hybrid reluctance actuator for energy efficiency[J]. IEEE Transactions on Industrial Electronics, 2019, 66(4): 3051-3059. doi: 10.1109/TIE.2018.2842735
|
[6]
|
CAI K H, TIAN Y L, LIU X P, et al. Development and control methodologies for 2-DOF micro/nano positioning stage with high out-of-plane payload capacity[J]. Robotics and Computer-Integrated Manufacturing, 2019, 56: 95-105. doi: 10.1016/j.rcim.2018.08.007
|
[7]
|
OKYAY A, ERKORKMAZ K, KHAMESEE M B. Mechatronic design, actuator optimization, and control of a long stroke linear nano-positioner[J]. Precision Engineering, 2018, 52: 308-322. doi: 10.1016/j.precisioneng.2018.01.007
|
[8]
|
NIKOOIENEJAD N, ALIPOUR A, MAROUFI M, et al. Video-rate non-raster AFM imaging with cycloid trajectory[J]. IEEE Transactions on Control Systems Technology, 2020, 28(2): 436-447. doi: 10.1109/TCST.2018.2879939
|
[9]
|
吴文鹏, 王一帆, 胡贞. 微纳操纵成像迭代学习前馈反馈控制研究[J]. 机械科学与技术, 2022, 41(3): 414-420. doi: 10.13433/j.cnki.1003-8728.20200360 WU W P, WANG Y F, HU Z. Exploring a feedforward and feedback control method for iterative learning by micro-nano manipulative imaging system[J]. Mechanical Science and Technology for Aerospace Engineering, 2022, 41(3): 414-420. (in Chinese) doi: 10.13433/j.cnki.1003-8728.20200360
|
[10]
|
陈国真, 徐斯强, 刘品宽, 等. 大行程快速反射镜的结构设计及带宽特性[J]. 光学精密工程, 2020, 28(1): 90-101.CHEN G Z, XU S Q, LIU P K, et al. Structural design and bandwidth characteristic of a fast steering mirror with large travel range[J]. Optics and Precision Engineering, 2020, 28(1): 90-101. (in Chinese)
|
[11]
|
戴一帆, 段纬然, 王贵林, 等. 音圈电机驱动的快刀伺服系统建模与性能分析[J]. 国防科技大学学报, 2008, 30(1): 78-82.DAI Y F, DUAN W R, WANG G L, et al. Study on modeling and performance of a fast tool servo system driven by voice coil motor[J]. Journal of National University of Defense Technology, 2008, 30(1): 78-82. (in Chinese)
|
[12]
|
ZHANG Z, YANG X D, YAN P. Large dynamic range tracking of an XY compliant nanomanipulator with cross-axis coupling reduction[J]. Mechanical Systems and Signal Processing, 2019, 117: 757-770. doi: 10.1016/j.ymssp.2018.08.014
|
[13]
|
XU Q S. New flexure parallel-kinematic micropositioning system with large workspace[J]. IEEE Transactions on Robotics, 2012, 28(2): 478-491. doi: 10.1109/TRO.2011.2173853
|
[14]
|
TIAN Y L, CAI K H, ZHANG D W, et al. Development of a XYZ scanner for home-made atomic force microscope based on FPAA control[J]. Mechanical Systems and Signal Processing, 2019, 131: 222-242. doi: 10.1016/j.ymssp.2019.05.057
|
[15]
|
KANG S, LEE M G, CHOI Y M. Six degrees-of- freedom direct-driven nanopositioning stage using crab-leg flexures[J]. IEEE/ASME Transactions on Mechatronics, 2020, 25(2): 513-525. doi: 10.1109/TMECH.2020.2972301
|