大行程推拉电磁驱动微定位平台的内环阻尼与迭代学习控制

摘要: 为了解决音圈电机驱动柔性微定位平台驱动力小和低阻尼谐振等问题, 本文采用两侧音圈电机的推拉模式来提升驱动力的大小, 并且利用内环阻尼控制器结合迭代学习控制方法来实现平台的精准控制。首先, 搭建了互补配置的双音圈电机驱动双平行四边形柔性机构的微定位平台。其次, 设计了内环阻尼速度反馈控制器。然后, 采用逆模型迭代学习控制方法来进一步消除周期性的干扰和误差。最后进行了跟踪实验。结果表明: 在跟踪1 Hz和2.5 Hz的正弦波时, 相比于PI控制, 最大误差分别减少74.6%和68.6%, 满足微定位平台精准控制的要求。
- 阻尼控制 /
- 迭代学习控制 /
- 微定位平台 /
- 音圈电机 /
- 柔性机构
Abstract: In order to solve the problems of small driving force and low damping resonance of the flexure micro-positioning stage driven by voice coil motors (VCM), a push-pull mode of VCMs on both sides is adopted to enhance the driving force, and the inner loop damping controller combined with iterative learning control (ILC) method is used to realize the precise control of the stage. Firstly, a micro-positioning stage of compound parallelogram flexure mechanism driven by dual VCMs with complementary configuration is built. Secondly, an inner loop damping speed feedback controller is designed. Then, the inverse model ILC method is used to eliminate the periodic interference and error. Finally, the tracking experiment is carried out. The results show that when tracking the sine wave of 1 Hz and 2.5 Hz, the maximum error is reduced by 74.6% and 68.6% respectively compared with PI control, which meets the requirements of precise control of the micro-positioning stage.
- damping control /
- iterative learning control /
- micro-positioning stage /
- voice coil motor /
- flexure mechanism

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图 1 微定位平台实验系统

Figure 1. The micro positioning platform experimental system

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图 2 双平行四杆柔性机构

Figure 2. The double parallelogram flexible mechanism

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图 3 定位系统控制回路

Figure 3. The positioning system control circuit

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图 4 阻尼控制器加入前后系统的伯德图

Figure 4. The bode diagram of system before and after adding damping controller

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图 5 阻尼控制环路P

Figure 5. Damping control loop P

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图 6 逆补偿迭代学习控制框图

Figure 6. The inverse compensation iterative learning control diagram

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图 7 PI对1 Hz和2.5 Hz正弦信号的跟踪效果

Figure 7. The tracking effect of PI on 1 Hz and 2.5 Hz sine signals

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图 8 含PI的迭代控制对1 Hz和2.5 Hz正弦信号的跟踪效果

Figure 8. The tracking effect of iterative control with PI on 1 Hz and 2.5 Hz sine signals

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图 9 含内环阻尼和PI的迭代学习控制对不同频率正弦波的最大跟踪误差收敛效果

Figure 9. The convergence effect of inverse model compensation iterative learning control with inner loop damping and PI on maximum tracking error of different frequency sine waves

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