薄膜厚度对Si基SiO<sub>2</sub>薄膜力学性能的影响

聂晓梦; 李继军; 郎风超; 张伟光; 赵春旺; 邢永明

doi:10.13433/j.cnki.1003-8728.20180211

薄膜厚度对Si基SiO₂薄膜力学性能的影响

doi: 10.13433/j.cnki.1003-8728.20180211

1.
内蒙古工业大学理学院, 呼和浩特 010051
2.
上海海事大学文理学院, 上海 201306
3.
内蒙古自治区土木工程结构与力学重点实验室, 呼和浩特 010051

基金项目:

国家自然科学基金项目 11562016

国家自然科学基金项目 11762014

国家自然科学基金项目 11762013

内蒙古自然科学基金项目 2018MS01013

内蒙古工业大学科研项目 X201713

国家留学基金项目 20145049

详细信息

作者简介:
聂晓梦(1992-), 硕士研究生, 研究方向为固体材料微结构, 153726497@qq.com

通讯作者:
李继军, 副教授, 硕士生导师, ji_jun_li@163.com

中图分类号: TG147
计量
- 文章访问数: 380
- HTML全文浏览量: 117
- PDF下载量: 50
- 被引次数: 0
出版历程
- 收稿日期: 2018-06-10
- 刊出日期: 2019-04-05

Effect of Film Thickness on Mechanical Properties of Si-based SiO₂ Thin Films

1.
College of Sciences, Inner Mongolia University of Technology, Hohhot 010051, China
2.
College of Arts and Sciences, Shanghai Maritime University, Shanghai 201306, China
3.
Inner Mongolia Key Laboratory of Civil Engineering Structures and Mechanics, Hohhot 010051, China

摘要

摘要: 为了研究薄膜厚度对Si基SiO₂薄膜力学性能的影响规律，利用纳米压痕技术及有限元模拟方法对不同厚度的Si基SiO₂薄膜材料进行测试，分析了不同厚度薄膜的硬度及弹性模量等力学性能，讨论了不同压深膜厚比对不同厚度薄膜弹性恢复率的影响，并在试验的基础上，建立了有限元模型，模拟了不同厚度薄膜在相同压深下的载荷位移关系，分析了薄膜的弹性恢复性能。结果表明：SiO₂薄膜越厚其弹性模量越小，而薄膜的硬度在薄膜较薄时压痕的尺寸效应更明显，并利用模拟进一步分析得出薄膜越薄弹性恢复性能越好。
- Si基SiO₂薄膜 /
- 纳米压痕 /
- 有限元模拟 /
- 弹性模量 /
- 硬度
Abstract: In order to study the effect of the film thickness on the mechanical properties of Si-based SiO₂ films, nanoindentation technology and finite element simulation of ABAQUS were used to test Si-based SiO₂ films with different thicknesses. The mechanical properties including the hardness and elastic modulus of films with different thicknesses were analyzed. The effects of the pressure depths and film thickness ratios on the elastic recovery rate of films with different thicknesses are discussed. Based on the experiments, the finite element model was established. The load-displacement relationship of films with different thickness under the same pressure depth was simulated, and the elastic recovery performance of the film was analyzed. The results show that the thicker the SiO₂ film is, the smaller the elastic modulus is. When the film is thin, the size effect of the indentation of the film is more obvious, and further analysis by using simulation shows that the thinner the film is, the better the elastic recovery performance is.
- Si-based SiO₂ thin films /
- nanoindentation /
- FEM /
- elastic modulus /
- hardness

HTML全文

图 1 硬度随压深的变化

下载: 全尺寸图片幻灯片

图 2 弹性模量随压深的变化曲线

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图 3 样品Ⅰ、Ⅱ、Ⅲ压深占膜厚百分比相同情况下的载荷位移曲线

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图 4 样品Ⅰ、Ⅱ、Ⅲ在不同压深膜厚比下的弹性恢复率

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图 5 模型及网格划分

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图 6 不同厚薄膜压深不同时，试验与模拟载荷位移关系

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图 7 3种厚薄膜模拟固定压深50 nm载荷位移关系

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表 1 模拟材料参数

名称	弹性模量/GPa	泊松比	屈服强度/GPa	切线模量/GPa
SiO₂薄膜	81	0.27	7.15	8.45
Si基底	180	0.23	9.14	10.98

下载: 导出CSV

表 2 不同厚度SiO₂薄膜塑性参数

参数名称	500 nm	1000 nm	2000 nm
弹性模量/GPa	88	81	77
屈服强度/GPa	8.7	7.15	6.3
切线模量/GPa	9.45	8.45	8.35

下载: 导出CSV

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