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镀有石墨烯层微热压模具电热耦合作用数值仿真

王玫 董力群 范一强 张亚军 庄俭

王玫, 董力群, 范一强, 张亚军, 庄俭. 镀有石墨烯层微热压模具电热耦合作用数值仿真[J]. 机械科学与技术, 2018, 37(1): 120-124. doi: 10.13433/j.cnki.1003-8728.2018.0118
引用本文: 王玫, 董力群, 范一强, 张亚军, 庄俭. 镀有石墨烯层微热压模具电热耦合作用数值仿真[J]. 机械科学与技术, 2018, 37(1): 120-124. doi: 10.13433/j.cnki.1003-8728.2018.0118
Wang Mei, Dong Liqun, Fan Yiqiang, Zhang Yajun, Zhuang Jian. Numerical Simulation of Micro Extrusion Mold Coated with Graphene Layers Coupling Electricity with Heat[J]. Mechanical Science and Technology for Aerospace Engineering, 2018, 37(1): 120-124. doi: 10.13433/j.cnki.1003-8728.2018.0118
Citation: Wang Mei, Dong Liqun, Fan Yiqiang, Zhang Yajun, Zhuang Jian. Numerical Simulation of Micro Extrusion Mold Coated with Graphene Layers Coupling Electricity with Heat[J]. Mechanical Science and Technology for Aerospace Engineering, 2018, 37(1): 120-124. doi: 10.13433/j.cnki.1003-8728.2018.0118

镀有石墨烯层微热压模具电热耦合作用数值仿真

doi: 10.13433/j.cnki.1003-8728.2018.0118
详细信息
    作者简介:

    王玫(1992-),硕士,研究方向为石墨烯微热压,janet_wangmei@163.com

    通讯作者:

    庄俭,副教授,博士,vipzhuangjian@163.com

Numerical Simulation of Micro Extrusion Mold Coated with Graphene Layers Coupling Electricity with Heat

  • 摘要: 提出一种提高微热压模具加热冷却速率、缩短微热压成型循环周期的方法。在硅片表面使用化学气相沉积CVD的方法制备石墨烯层,利用石墨烯层高电导率、热导率等特性,研究石墨烯层电热耦合作用对模具温度的影响规律。模拟结果表明,硅模具施加电势增加或石墨烯层厚增加,硅片表面平均温度的升高速率增大;当石墨烯层厚为40 nm、施加电压为150 V时,硅片表面由室温升温加热速率可以达到9.87 K/s,模具温度稳定后,微结构处的温度略高于硅片表面其他位置。
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出版历程
  • 收稿日期:  2016-08-31
  • 刊出日期:  2018-01-15

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