A Self-powered Sensor of Acoustic Metamaterial and Helmholtz Resonator Structure
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摘要: 随着物联网的发展，自供能声学传感器得到了广泛关注。然而，压电传感器的灵敏度等关键指标难以进一步提升。声学超材料能以传统材料无法实现的方式操控声波，为新型声学传感器的设计提供了新思路。本文设计了一种声学超材料和亥姆霍兹谐振结构的自供能声学传感器，并验证了具有缺陷的声学超材料能够聚焦声能；此外，亥姆霍兹谐振器能将聚焦在声学超材料缺陷处的能量进一步放大，传输比超过40 mV/Pa，能满足小型传感器的自供能需求。实验结果表明: 与仅有局部缺陷的声学超材料传感器相比，基于亥姆霍兹谐振器的声学超材料传感器具有更高的灵敏度和信噪比。Abstract: With the development of Internet of Things, self-powered acoustic sensors have attracted extensive attention. However, it is difficult to further improve piezoelectric sensors′ sensitivity and other vital indicators. Acoustic metamaterials can manipulate sound waves, while traditional materials cannot, thus providing a new method for designing new acoustic sensors. This paper designs a self-powered sensor of acoustic metamaterial and Helmholtz resonance structure. It also verifies that the defective acoustic metamaterial can focus acoustic energy. In addition, the Helmholtz resonator can further amplify the acoustic energy focused on the defective acoustic metamaterial. Its transmission ratio is more than 40 mV/Pa and meets the demand of a small self-powered sensor. The experimental results show that compared with the acoustic metamaterial sensor, the acoustic metamaterial sensor based on the Helmholtz resonator has higher sensitivity and signal-to-noise ratio.
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Key words:
- acoustic metamaterials /
- Helmholtz resonator /
- acoustic sensor
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图 1 局域共振声学超材料的周期结构与点缺陷
Figure 1. The periodic structure and point defect of the acoustic metamaterial
图 3 局域共振声学超材料单胞能带结构
Figure 3. energy band structure of the unit cell of acoustic metamaterial
图 6 Helmholtz谐振器等效弹簧振子
Figure 6. The equivalent spring oscillator model of the Helmholtz resonator
图 7 超材料与Helmholtz共振结构
Figure 7. The metamaterial and the Helmholtz resonance structure
图 8 声学超材料结构缺陷模式位移场
Figure 8. The displacement field of the acoustic metamaterial defect mode
图 9 超材料与Helmholtz共振结构共振模式位移场
Figure 9. The displacement field of the metamaterial and Helmholtz resonance structural resonant mode
图 10 超材料与Helmholtz共振结构模型
Figure 10. The model of the metamaterial and Helmholtz resonance structure
图 12 不同声压下AMS的响应曲线
Figure 12. The response curve of the AMS under different sound pressure
图 13 不同声压下AMHS的响应曲线
Figure 13. The response curve of the AMHS under different sound pressure
图 14 AMS的信号电压和噪声电压
Figure 14. Signal voltage and noise voltage of the AMS at 1-Pa pressure (in blue) and at no input (in black)
图 15 AMHS的信号电压和噪声电压
Figure 15. Signal voltage and noise voltage of the AMHS at 1-Pa pressure (in red) and at no input (in black)
表 1 共振结构的材料参数
Table 1. The material parameters of the resonance structure
材料 参数 数值 硅胶 密度 1 230.50 kg/m3 杨氏模量 9.38 MPa 泊松比 0.49 铝 密度 2 750 kg/m3 杨氏模量 70 GPa 泊松比 0.33 聚乳酸 密度 1 240 kg/m3 杨氏模量 0.38 GPa 泊松比 0.35 PZT-5H 密度 7 450 kg/m3 柔度s11 7.69×10-11 m2/N 柔度s12 -4.78×10-12 m2/N 压电常数d31 -1.86×10-10 C/N 压电常数d33 6.70×10-10 C/N 相对介电常数 5 800 
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