磷锗锌晶体脆塑转变临界切削深度的研究

摘要: 为实现磷锗锌(ZnGeP₂)晶体超精密切削, 提高表面加工质量, 获得纳米级的超光滑表面, 基于纳米压痕实验计算出磷锗锌晶体表面脆塑转变临界深度。在此深度内切削材料产生脆塑转变, 并以塑性方式去除。在此基础上, 采用单点金刚石飞切机床DFC600A开展磷锗锌晶体超精密切削。通过控制切削深度低于磷锗锌晶体脆塑转变临界深度, 使材料表面仅发生塑性变形, 实现了晶体表面纳米级光滑表面加工, 表面粗糙度达1.01 nm, 达到了对磷锗锌晶体表面的加工要求, 验证了方法的有效性。
- 磷锗锌晶体 /
- 纳米压痕实验 /
- 临界深度 /
- 超精密切削
Abstract: In order to realize ultra-precision cutting of ZnGeP₂ crystals, improve the surface processing quality and obtain a nano-scale smooth surface, the critical depth by brittle-ductile transformation on the surface of ZnGeP₂ crystals was calculated according to the nanoindentation experiments. Within this depth, the cutting material occurs a brittle-ductile transformation and is removed in a ductile manner. On this basis, the ultra-precision cutting of ZnGeP₂ crystals was carried out with a single-point diamond fly cutting machine DFC600A. By controlling the cutting depth to be lower than the critical depth of the brittle-ductile transformation of the ZnGeP₂ crystals, make the surface of the material only plastically deformed, the nano-scale smooth surface processing of the crystal surface was achieved, and the surface roughness reached 1.01 nm, met the requirements for the surface of the ZnGeP₂ crystal, which verified the effectiveness of the method.
- ZnGeP₂ crystals /
- nanoindentation experiment /
- critical depth /
- ultra-precision cutting

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图 1 压入深度和载荷随时间变化曲线

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图 2 纳米压痕实验后的ZGP晶体表面

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图 3 单点金刚石飞切机床DFC600A

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图 4 ZGP晶体SPDT加工精度

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