Realization of Two Dimensional High Frequency Ultrasonic Vibration using Guided Wave Transmission
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摘要: 为简化二维超声椭圆振动结构，提高刀尖振动响应精度，利用导波具备单向动态刚度特性，研制了利用导波线传导超声振动的高频二维振动装置。该装置由101.96 kHz的纵振换能器和纵-弯复合振动工具头组成，用导波线将换能器和振动工具头连接起来，通过两路激励电源输出相位差的调节，能够获得相应的二维振动轨迹，并利用有限元仿真模态分析对该装置进行结构优化，确定最优结构。对整体二维振动装置振动特性检测结果表明，振动工具头前端的刀尖能产生一个0.4 mm振幅的纵-弯复合振动。该装置可以应用于超精密切削，如航空航天、军事、电子和光学等需要高精度或难加工零部件的加工。Abstract: To simplify the structure of two-dimensional ultrasound elliptical vibration and improve the vibration response accuracy of the tool nose, a high frequency two-dimensional vibration device using guided wave line to conduct ultrasonic vibration is designed by the unidirectional dynamic stiffness characteristics of guided waves. The device consists of the 101.96 kHz longitudinal vibration transducer and the longitudinal-bend compound vibration tool fixture, and the guided wave line is used to connect the transducer to the vibration tool fixture. The two-dimensional vibration trajectory can be obtained through adjusting the output phase difference of the two excitation power supplies. The optimal structure of the device is finally determined by finite element modal analysis. The vibration characteristics of the two-dimensional vibration device are detected, and the test result shows that the tool nose at the front of vibration tool fixture can produce 0.4um amplitude of longitudinal-bend compound vibration. The device can be applied to ultra-precision cutting such as those requiring high-precision or difficult-to-process components in aerospace, military, electronics and optics processing.
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表 1 材料参数
材料 密度ρ/
(kg·m-3)杨氏模量
E/GPa泊松比μ 45钢 7 850 210 0.269 PZT-4 7 500 68 0.30 TC4 4 620 96 0.36 
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