Current State and Development Trends of Nano-indentation Technology
-
摘要: 纳米压痕技术是一种新的材料特性测量方法,被广泛应用在研究微/纳零部件的力学性能和材料微纳区域内的局部特性。介绍了纳米压痕技术的基本理论方法;针对纳米压痕技术的理论建模、压痕形貌、微观组织以及测量精度等几个方面对现有的研究成果进行系统的分析和总结;分析了纳米压痕技术现存的研究难点及主要问题,并对其发展趋势进行了展望。Abstract: As an advanced measuring technology, nano-indentation technology has been widely used in small volumes, especially for the measurement of material properties at microscopic and smaller scale to identify material parameters. Therefore,it is necessary to systematically and intensively review current achievements.Firstly, the principle of nano-indentation technology is analyzed. Then, the research progress both at domestic and abroad is summarized. Lastly, the research difficulties and the main problems in current research of nano-indentation technology are pointed out. The development trends of nano-indentation technology are proposed.
-
Key words:
- nano-indentation technology /
- current state /
- development trends
-
[1] 黎明,温诗铸.纳米压痕技术理论基础[J].机械工程学报,2003,39(3):142-145 Li M, Wen S Z. Theoretical methods on nanoindentation[J]. Chinese Journal of Mechanical Engineering, 2003,39(3):142-145(in Chinese) [2] 张段芹,刘建秀,褚金奎.低维纳米材料的力学性能测试技术研究进展[J].微纳电子技术,2014,51(7):451-457 Zhang D Q, Liu J X, Chu J K. Research progress in testing techniques for mechanical properties of the low-dimensional nano-materials[J]. Micronanoelectronic Technology, 2014,51(7):451-457(in Chinese) [3] 周向阳,蒋庄德,俞瑞霞,等.基于纳米压入技术的新型MEMS/NEMS材料力学行为表征[J].机械强度,2008,30(2):199-206 Zhou X Y, Jiang Z D, Yu R X, et al. Mechanical characterization of new MES/NEMS materials using Nanoindentation technique[J]. Journal of Mechanical Strength, 2008,30(2):199-206(in Chinese) [4] 吴军,金杰,周兆忠,等.基于纳米压痕试验的TiN镀膜有限元分析[J].机械工程材料,2015,39(4):97-102 Wu J, Jin J, Zhou Z Z, et al. Finite element analysis of titanium nitride films based on Nanoindentation test[J]. Materials for Mechanical Engineering, 2015,39(4):97-102(in Chinese) [5] Poitrimolt M, Cheikh M, Bernhart G, et al. Characterisation of the transverse mechanical properties of carbon/carbon composites by spherical indentation[J]. Carbon, 2014,66:234-245 [6] He D, Zhu J C, Lai Z H, et al. Residual elastic stress-strain field and geometrically necessary dislocation density distribution around Nano-indentation in TA15 titanium alloy[J]. Transactions of Nonferrous Metals Society of China, 2013,23(1):7-13 [7] Oliver W C, Pharr G M. An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments[J]. Journal of Materials Research, 1992,76(6):1564-1583 [8] Sneddon I N. The relation between load and penetration in the axisymmetric boussinesq problem for a punch of arbitrary profile[J]. International Journal of Engineering Science, 1965,3(1):47-57 [9] Youn S W, Kang C G. FEA study on nanodeformation behaviors of amorphous silicon and borosilicate considering tip geometry for pit array fabrication[J]. Materials Science and Engineering:A, 2005,390(1-2):233-239 [10] Taljat B, Pharr G M. Development of pile-up during spherical indentation of elastic-plastic solids[J]. International Journal of Solids and Structures, 2004,41(14):3891-3904 [11] Giannakopoulos A E, Suresh S. Determination of elastoplastic properties by instrumented sharp indentation[J]. Scripta Materialia, 1999,40(10):1191-1198 [12] Créac'hcadec R, Cognard J Y. 2-D modeling of the behavior of an adhesive in an assembly using a non-associated Elasto-Visco-Plastic model[J]. The Journal of Adhesion, 2009,85(4-5):239-260 [13] Elkut F, Bradley G R, Krywonos J, et al. Numerical study of the mechanics of indentation bending tests of thin membranes and inverse materials parameters prediction[J]. Computational Materials Science, 2012,52(1):123-127 [14] Treier K, Lester P, Hubbuch J. Application of genetic algorithms and response surface analysis for the optimization of batch chromatographic systems[J]. Biochemical Engineering Journal, 2012,63:66-75 [15] Bouzakis K D, Micailidis N, Hadjiyiannis S, et al. The effect of specimen roughness and indenter tip geometry on the determination accuracy of thin hard coatings stress-strain laws by nanoindentation[J]. Materials Characterization, 2003,49(2):149-156 [16] Kim J Y, Kang S K, Lee J J, et al. Influence of surface-roughness on indentation size effect[J]. Acta Materialia, 2007,55(10):3555-3652 [17] Wu X W, Moon R J, Martini A. Crystalline cellulose elastic modulus predicted by atomistic models of uniform deformation and nanoscale indentation[J]. Cellulose, 2013,20(1):43-55 [18] Chollacoop N, Dao M, Suresh S. Depth-sensing instrumented indentation with dual sharp indenters[J]. Acta Materialia, 2003,51(13):3713-3729 [19] Cheng Y T, Cheng C M, Ni W Y. Methods of obtaining instantaneous modulus of viscoelastic solids using displacement-controlled instrumented indentation with axisymmetric indenters of arbitrary smooth profiles[J]. Materials Science and Engineering:A, 2006,423(1-2):2-7 [20] Kozhevnikov I F, Cesbron J, Duhamel D, et al. A new algorithm for computing the indentation of a rigid body of arbitrary shape on a viscoelastic half-space[J]. International Journal of Mechanical Sciences, 2008,50(7):1194-1202 [21] Rauchs G, Bardon J. Identification of elasto-viscoplastic material parameters by indentation testing and combined finite element modelling and numerical optimization[J]. Finite Elements in Analysis and Design, 2011,47(7):653-667 [22] 刘扬,陈定方.基于纳米压痕技术和有限元仿真的材料力学性能分析[J].武汉理工大学学报(交通科学与工程版),2003,27(5):690-693 Liu Y, Cheng D F. Measurement of material mechanical properties using nanoindentation and finite element simulation[J]. Journal of Wuhan University of Technology (Transportation Science & Engineering), 2003,27(5):690-693(in Chinese) [23] 李敏,梁乃刚,张泰华,等.纳米压痕过程的三维有限元数值试验研究[J].力学学报,2003,35(3):257-264 Li M, Liang N G, Zhang T H, et al. 3D finite element simulation of the nanoindentation process[J]. Acta Mechanica Sinica, 2003,35(3):257-264(in Chinese) [24] Guo W C, Rauchs G, Papeleux L, et al. Evaluation of the mechanical properties of plasma-sprayed coating by nanoindentation technology[J]. Mechanics & Industry, 2012,13(3):151-162 [25] 马永,姚晓红,田林海,等.利用纳米压入的反演分析法确定金属材料的塑性性能[J].金属学报,2011,47(3):321-326 Ma Y, Yao X H, Tian L H, et al. Extract the plastic properties of metals using reverse analysis of nanoindentation test[J]. Acta Metallurgica Sinica, 2011,47(3):321-326(in Chinese) [26] Yu W S, Shen S P. Effects of small indenter size and its position on incipient yield loading during nanoindentation[J]. Materials Science and Engineering:A, 2009,526(1-2):211-218 [27] 黎军顽,倪玉山.纳米压痕过程的多尺度模拟与Rice-Thomson位错模型分析[J].稀有金属材料与工程,2010,39(12):2095-2100 Li J W, Ni Y S. Multiscale simulation and rice-thomson dislocation model analysis of nanoindentation[J]. Rare Metal Materials and Engineering, 2010,39(12):2095-2100(in Chinese) [28] 王昕捷,吴艳青,黄风雷.含能单晶微纳米力学性能试验研究及数值表征[J].兵工学报,2014,35(S2):178-183 Wang X J, Wu Y Q, Huang F L. Nano-indentation experiments on energetic crystals[J]. Acta Armamentarii, 2014,35(S2):178-183(in Chinese) [29] Xu J, Corr D J, Shah S P. Nanomechanical properties of C-S-H gel/cement grain interface by using nanoindentation and modulus mapping[J]. Journal of Zhejiang University-Science A, 2015,16(1):38-46 [30] Xiao L, Ye D Y, Chen C Y. A further study on representative models for calculating the residual stress based on the instrumented indentation technique[J]. Computational Materials Science, 2014,82:476-482 [31] Huang H, Zhao H W, Ma Z C, et al. Design and analysis of the precision-driven unit for nano-indentation and scratch test[J]. Journal of Manufacturing Systems, 2012,31(1):76-81 [32] 黄虎,赵宏伟,史成利,等.压电驱动型微纳米压痕测试装置的设计与试验研究[J].机械工程学报,2013,49(12):1-7 Huang H, Zhao H W, Shi C L, et al. Design and experimental investigation of PZT-driving type micro/nanoindentation device[J]. Journal of Mechanical Engineering, 2013,49(12):1-7(in Chinese) [33] 洪磊,苏亚辉,田洁,等.黏弹性材料纳米压痕测试及接触形貌的影响[J].中国科学技术大学学报,2011,41(5):432-438 Hong L, Su Y H, Tian J, et al. Nano-indentation test of visco-elastic materials and the influence of contact geometry on indentation[J]. Journal of University of Science and Technology of China, 2011,41(5):432-438(in Chinese) [34] 胡腾越,郑百林,贺鹏飞,等.压头速度对Ni3Al纳米压痕过程影响的数值仿真[J].计算机辅助工程,2013,22(5):105-107,111 Hu T Y, Zheng B L, He P F, et al. Numerical simulation on effect of indenter velocity on Ni3Al nano-indentation process[J]. Computer Aided Engineering, 2013,22(5):105-107,111(in Chinese) [35] Ma Z S, Zhou Y C, Long S G, et al. Characterization of stress-strain relationships of elastoplastic materials:an improved method with conical and pyramidal indenters[J]. Mechanics of Materials, 2012,54:113-123
点击查看大图
计量
- 文章访问数: 461
- HTML全文浏览量: 61
- PDF下载量: 42
- 被引次数: 0