Simulation and Experimental Study on Through-mask Electrochemical Micromachining Process for Micro-texturing on Inner Surface of Bushing
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摘要: 掩膜电解加工是金属基底表面织构化的有效手段,为了实现在轴套内表面阵列微结构的加工,进行了活动掩膜电解加工方法的仿真与试验研究。建立了活动掩膜电解加工有限元计算模型,通过数值计算分析了图形分布均匀性及掩膜厚度影响电流密度分布的规律和机理。结果表明:采用掩膜和阴极一体化的这种特殊电极结构形式,加工非均匀占空比图形时更有利于得到一致的加工深度;通过控制掩膜厚度与图形特征尺寸的关系,可以控制所加工的微结构底部形状。以仿真计算结论为依据进行了掩膜电解试验优化,并采用优化的工艺参数在轴套的内表面加工出了直径为100μm的微坑阵列。Abstract: Through-mask electrochemical micromachining (TM-EMM) is an effective method for surface texturing of metal substrate. To fabricate the microstructure array on the inner surface of bushing, the simulations and experiments for TM-EMM have been conducted. The finite element model has been built and the influence laws and mechanisms of pattern distribution nonuniformity and mask thickness on the current density distribution have been investigated. The numerical calculation results show that adoption of the all-in-one style of mask and cathode facilitates more uniform etched depth for machining on surface with nonuniform pattern distribution and the bottom topography of etched microstructure can be regulated by regulating the ratio of mask thickness and patter size. Based on the simulation results, machining parameters optimization have been experimentally conducted and the micro-pits with a diameter of 100μm have successfully fabricated under the optimized conditions.
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Key words:
- bushing /
- computer simulation /
- microstructure /
- through-mask EMM
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[1] 张嗣伟.我国摩擦学工业应用的节约潜力巨大-谈我国摩擦学工业应用现状的调查[J].中国表面工程,2008,21(2):50-52 Zhang S W. Enormous economy potential of tribology application in industry in China-on the survey of present status of tribology application in industry[J]. China Surface Engineering, 2008,21(2):50-52(in Chinese) [2] Etsion I. State of the art in laser surface texturing[J]. Journal of Tribology, 2005,127(1):248-253 [3] Kovalchenko A, Ajayi O, Erdemir A, et al. The effect of laser surface texturing on transitions in lubrication regimes during unidirectional sliding contact[J]. Tribology International, 2005,38(3):219-225 [4] Bruzzone A A G, Costa H L, Lonardo P M, et al. Advances in engineered surfaces for functional performance[J]. CIRP Annals-Manufacturing Technolgoy, 2008,57(2):750-769 [5] Landolt D, Chauvy P F, Zinger O. Electrochemical micromachining polishing and surface structuring of metals:fundamental aspects and new developments[J]. Electrochinica Acta, 2003,48(20-22):3185-3201 [6] Zhu D, Qu N S, Li H S, Zeng Y B, et al. Electrochemical micromachining of microstructures of micro hole and dimple array[J]. CIRP Annals-Manufacturing Technolgoy, 2009,58(1):177-180 [7] Schuster R. Electrochemical microstructuring with short voltage pulses[J]. Chemphyschem, 2007,8(1):34-39 [8] Kern P, Veh J, Michler J. New developments in through-mask electrochemical micromachining of titanium[J]. Journal of Micromechanics and Microengineering, 2007,17(6):1168-1177 [9] Chauvy P F, Hoffmann P, Landolt D. Applications of laser lithography on oxide film to titanium micromachining[J]. Applied Surface Science, 2003:165-170 [10] Hao X Q, Wang L, Wang Q D, et al. Surface micro-texturing of metallic cylindrical surface with proximity rolling-exposure lithography and electrochemical micromachining[J]. Applied Surface Science, 2011,257(21):8906-8911 [11] Qian S Q, Zhu D, Qu N S, et al. Generating micro-dimples array on the hard chrome-coated surface by modified through mask electrochemical micromachining[J]. The International Journal of Advanced Manufacturing Technology, 2010,47(9-12):1121-1127 [12] 吴承伟,马国军,周平.流体流动的边界滑移问题研究进展[J].力学进展,2008,38(3):265-282 Wu C W, Ma G J, Zhou P. A review of the study on the boundary slip problems of fluid flow[J]. Advances in Mechanics, 2008,38(3):265-282(in Chinese) [13] 王建业,徐家文.电解加工原理及应用[M].北京:国防工业出版社,2001 Wang J Y, Xu J W. The fundamentals and its applications of electrochemical machining[M]. Beijing:National Defense Industry Press, 2001(in Chinese) [14] Wang L, Wang Q D, Hao X Q, et al. Finite element simulation and experimental study on the through-mask electrochemical micromachining (EMM) process[J]. The International Journal of Advanced Manufacturing Technology, 2010,51(1-4):155-162 [15] Nanbu T, Ren N, Yasuda Y, et al. Micro-textures in concentrated conformal-contact lubrication:effects of texture bottom shape and surface relative motion[J]. Tribology Letters, 2008,29(3):241-252
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