精密主动减振器技术研究现状与进展

廖飞红; 李小平; 陈学东; 袁志扬; 李巍

精密主动减振器技术研究现状与进展

1.
华中科技大学数字制造装备与技术国家重点实验室, 武汉 430074;
2.
上海微电子装备有限公司, 上海 201203

基金项目:

国家自然科学基金项目(50605025)

国家973计划项目(2009CB724205)资助

详细信息

作者简介:
廖飞红(1983-)，博士研究生，研究方向为精密运动控制，lfh159257@163.com;李小平(联系人)，研究员，博士生导师，xpli@public.wh.hb.cn

廖飞红(1983-)，博士研究生，研究方向为精密运动控制，lfh159257@163.com;李小平(联系人)，研究员，博士生导师，xpli@public.wh.hb.cn

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出版历程
- 收稿日期: 2011-08-02
- 刊出日期: 2015-06-10

Developments and Prospects of Active Vibration Isolator for Precision Equipment

1.
State Key Laboratory of Digital Manufacturing Equipment and Technology, Huazhong University of Science and Technology, Wuhan 430074;
2.
Shanghai Micro Electronics Equipment Co.Ltd, Shanghai 201203

摘要

摘要: 环境振动直接降低精密制造和测量设备的动态性能,成为其性能的主要影响因素。主动减振器用于衰减地基振动和负载直接扰动,以维持精密设备的负载平台的稳定性。主动减振器按固有频率的差异,区分为软式主动减振器和硬式主动减振器。高刚性的硬式主动减振器衰减负载的直接扰动力和结构模态,低刚性的软式主动减振器能较好的隔离地基振动。论述两种类型主动减振器的结构技术的研究成果、研究进展和及其应用。针对精密设备发展对主动减振器的应用需求,对硬式主动减振器和软式主动减振器的结构技术的发展前景进行展望,指出其发展面临的挑战与有待解决的关键技术。
- 主动减振器 /
- 精密设备 /
- 硬式主动减振器 /
- 软式主动减振器
Abstract: Environment vibration directly leads to dynamic performance degradation and becomes one of key impact factors on the precision equipment performance. Active vibration isolator is used to damp the environment vibration both from base disturbance and direct disturbance in order to maintain the stability of the payload of precision equipment. Active vibration isolators are classified into hard mounts and soft mounts according to its natural fre-quency. Hard mounts are commonly used to damp direct disturbance and structure mode of the payload with their high stiffness while soft mounts are used to isolate the base disturbance. The technological prospects about struc-tures of both soft mounts and hard mounts are given and some challenges and unsolved key technologies for the structure of active vibration isolator are proposed.
- active vibration isolator /
- precision equipment /
- hard mounts /
- soft mounts

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