Design and Analysis on a Novel Type of Spatial Micro-gripper with Large Displacement
-
摘要: 针对传统微夹持器夹持范围小、易对物体造成损伤等不足, 基于桥式放大机构和杠杆原理设计了一种新型微夹持器。该微夹持器不仅能完成对不同尺寸大小微物体的微夹持操作, 还能避免在微夹持操作过程中对微小物体造成损伤或脱落, 以及适应不规则微小物体的夹持操作。阐明了夹持器的结构设计原理, 根据微夹持臂的工作原理建立了数学模型, 计算了微夹持臂的位移放大率。此外, 使用有限元分析软件ANSYS Workbench进行了静力学和动力学仿真, 并验证其夹持的有效范围。结果表明微夹持臂有较大的位移输出, 且其放大率的理论计算值与仿真分析值吻合良好。Abstract: To overcome the disadvantages of limited motion range and easy damage to objects, this paper proposes a novel micro-gripper integrated with bridge type amplification mechanism and lever mechanism. The gripper can adapt to different size objects avoiding damage or detachment of tiny objects during micro-clamping operations. Following issues were addressed in this paper, design of the micro-gripper described in detail, established the mathematical model according to the working principle of the micro-gripper arm, and obtained the magnification ratio of the micro-gripper arm. In addition, static and dynamic simulations were performed using the finite element analysis software ANSYS Workbench, including the verified motion range. The results showed that the theoretical calculation value of the magnification ratio is consistent with the simulation analysis value.
-
Key words:
- flexible hinge /
- bridge amplification /
- lever amplification /
- micro gripper
-
表 1 空载模式形状分析的频率
模态 频率/Hz 模态 频率/Hz 1阶 137.5 3阶 153.26 2阶 137.5 4阶 153.26 -
[1] 于靖军, 郝广波, 陈贵敏, 等. 柔性机构及其应用研究进展[J]. 机械工程学报, 2015, 51(13): 53-68 https://www.cnki.com.cn/Article/CJFDTOTAL-JXXB201513006.htmYU J J, HAO G B, CHEN G M, et al. State-of-art of compliant mechanisms and their applications[J]. Journal of Mechanical Engineering, 2015, 51(13): 53-68 (in Chinese) https://www.cnki.com.cn/Article/CJFDTOTAL-JXXB201513006.htm [2] 王念峰, 张志远, 张宪民, 等. 三种两自由度柔顺精密定位平台的性能对比与分析[J]. 机械工程学报, 2018, 54(13): 102-109 https://www.cnki.com.cn/Article/CJFDTOTAL-JXXB201813012.htmWANG N F, ZHANG Z Y, ZHANG X M, et al. Performance comparison and analysis of three 2-DOF compliant precision positioning stages[J]. Journal of Mechanical Engineering, 2018, 54(13): 102-109 (in Chinese) https://www.cnki.com.cn/Article/CJFDTOTAL-JXXB201813012.htm [3] 李海. 精密定位平台视觉运动追踪与伺服控制研究[D]. 广州: 华南理工大学, 2018LI H. Vision-based motion tracking and servo control of the precision positioning stages[D]. Guangzhou: South China University of Technology, 2018 (in Chinese) [4] 李祥春, 李杨民, 丁冰晓, 等. 新型3-PRC柔性并联微操作平台的研究[J]. 机械科学与技术, 2018, 37(5): 709-714 doi: 10.13433/j.cnki.1003-8728.2018.0509LI X C, LI Y M, DING B X, et al. An investigation on a novel 3-PRC compliant parallel micromanipulator[J]. Mechanical Science and Technology for Aerospace Engineering, 2018, 37(5): 709-714 (in Chinese) doi: 10.13433/j.cnki.1003-8728.2018.0509 [5] GARCÉS-SCHRÖDER M, LEESTER-SCHÄDEL M, SCHULZ M, et al. Micro-Gripper: a new concept for a monolithic single-cell manipulation device[J]. Sensors and Actuators A: Physical, 2015, 236: 130-139 doi: 10.1016/j.sna.2015.10.024 [6] 王振禄, 沈雪瑾, 陈晓阳. 基于MEMS工艺的电热致动器研究进展[J]. 半导体光电, 2015, 36(3): 341-347, 355 https://www.cnki.com.cn/Article/CJFDTOTAL-BDTG201503001.htmWANG Z L, SHEN X J, CHEN X Y. Latest development of electrothermal actuator based on MEMS process[J]. Semiconductor Optoelectronics, 2015, 36(3): 341-347, 355 (in Chinese) https://www.cnki.com.cn/Article/CJFDTOTAL-BDTG201503001.htm [7] 牛凯, 叶雄英, 周兆英, 等. M EM S微梁静电致动器的力学特性研究[J]. 压电与声光, 2005, 27(5): 507-509, 513 https://www.cnki.com.cn/Article/CJFDTOTAL-YDSG200505014.htmNIU K, YE X Y, ZHOU Z Y, et al. Research on mechanical properties of MEMS cantilever actuator based on the reduced order modeling[J]. Piezoelectrics & Acoustooptics, 2005, 27(5): 507-509, 513 (in Chinese) https://www.cnki.com.cn/Article/CJFDTOTAL-YDSG200505014.htm [8] 郑丽云, 沈剑英, 王鹏飞, 等. 用于压电驱动器位移放大的柔性铰链放大机构研究[J]. 科技创新与应用, 2018(7): 21-22, 24 https://www.cnki.com.cn/Article/CJFDTOTAL-CXYY201807008.htmZHENG L Y, SHEN J Y, WANG P F, et al. Study on flexible hinge amplifier used in piezoelectric actuator displacement amplification[J]. Technology Innovation and Application, 2018(7): 21-22, 24 (in Chinese) https://www.cnki.com.cn/Article/CJFDTOTAL-CXYY201807008.htm [9] 杨圣, 刘东伟. 纳米电磁致动器的发展[J]. 中国机械工程, 2001, 12(11): 1316-1319 doi: 10.3321/j.issn:1004-132X.2001.11.033YANG S, LIU D W. Development of nanometer electromagnetic actuators[J]. China Mechanical Engineering, 2001, 12(11): 1316-1319 (in Chinese) doi: 10.3321/j.issn:1004-132X.2001.11.033 [10] 卢琴琴. 基于形状记忆合金(SMA)的柔性致动器设计[D]. 西安: 西安电子科技大学, 2018LU Q Q. Design of flexible actuator based on shape memory alloy[D]. Xi'an: Xidian University, 2018 (in Chinese) [11] WU Z G, CHEN M. Model and study of clamping force for micro-gripper with PZT-driven[C]//Proceedings of the WRC Symposium on Advanced Robotics and Automation. Beijing, China: IEEE, 2019: 74-79 [12] 郝永平, 董福禄, 张嘉易, 等. 基于MEMS机构装配的微夹持器研究[J]. 中国机械工程, 2014, 25(5): 596-601 doi: 10.3969/j.issn.1004-132X.2014.05.006HAO Y P, DONG F L, ZHANG J Y, et al. Study on micro-gripper based on MEMS mechanism assembly[J]. China Mechanical Engineering, 2014, 25(5): 596-601 (in Chinese) doi: 10.3969/j.issn.1004-132X.2014.05.006 [13] CHEN W L, ZHANG X M, FATIKOW S. Design, modeling and test of a novel compliant orthogonal displacement amplification mechanism for the compact micro-grasping system[J]. Microsystem Technologies, 2017, 23(7): 2485-2498 doi: 10.1007/s00542-016-2989-x [14] XU Q S. Structure design of a new compliant gripper based on Scott-Russell mechanism[C]//IEEE International Conference on Robotics and Biomimetics. Shenzhen, China: IEEE, 2013: 1623-1628 [15] JOSHI R S, MITRA A C, KANDHARKAR S R. Design and analysis of compliant micro-gripper using pseudo rigid body model(PRBM)[J]. Materials Today: Proceedings, 2017, 4(2): 1701-1707 doi: 10.1016/j.matpr.2017.02.010 [16] NAH S K, ZHONG Z W. A microgripper using piezoelectric actuation for micro-object manipulation[J]. Sensors and Actuators A: Physical, 2007, 133(1): 218-224 doi: 10.1016/j.sna.2006.03.014 [17] KIVI A R, AZIZI S. On the dynamics of a micro-gripper subjected to electrostatic and piezoelectric excitations[J]. International Journal of Non-Linear Mechanics, 2015, 77: 183-192 doi: 10.1016/j.ijnonlinmec.2015.07.012 [18] 蔡建阳. 压电式微夹持器设计、建模与实验[D]. 赣州: 江西理工大学, 2017CAI J Y. Design, modeling and experiment of micro-gripper based on piezo actuator[D]. Ganzhou: Jiangxi University of Science and Technology, 2017 (in Chinese) [19] LI J Y, YAN P, LI J M. Displacement amplification ratio modeling of bridge-type nano-positioners with input displacement loss[J]. Mechanical Sciences, 2019, 10(1): 299-307 doi: 10.5194/ms-10-299-2019 [20] KOSEKI Y, TANIKAWA T, KOYACHI N, et al. Kinematic analysis of a translational 3-d. o. f. micro-parallel mechanism using the matrix method[J]. Advanced Robotics, 2002, 16(3): 251-264 doi: 10.1163/156855302760121927