Measuring Contaminant Particle Charge in Hot Film Gas Flow Sensor with Millikan Method
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摘要: 热膜式气体流量传感器在实际使用过程中，其芯片表面很容易被微小颗粒污染，使精度达不到工作要求。试验研究发现，传感器通电工作时，芯片表面电场力是造成污染物颗粒吸附堆积的主要因素。因此，污染物颗粒带电量的大小对芯片表面颗粒的堆积有着直接影响。文中采用Mastersizer 2000激光粒度分析仪和密立根油滴仪联合测量了颗粒群的平均粒径和平均带电量。激光粒度分析仪所测污染物颗粒的平均粒径为3.311 μm，根据此平均粒径值，密立根油滴仪所测3.2~3.4 μm范围内的颗粒所带平均带电量为6.4×10-17 C，此带电量即为整个颗粒群的平均带电量。
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关键词:
- 热膜式气体流量传感器 /
- 芯片污染 /
- 颗粒粒径测量 /
- 颗粒带电量测量 /
- 密立根法
Abstract: The accuracy of hot film gas flow sensor may be seriously affected when contaminants are accumulated on the chip of a sensor. The experimental study indicates that when the sensor is energized, the electric field force on the surface of the chip is the main cause for the absorption and accumulation of contaminant particles. Therefore, the amount of charge of contaminant particles has a direct influence on the accumulation of particles on the surface of the chip. In this paper, the average size and charge of the particle group are measured by a Mastersizer 2000 laser particle size analyzer and a Millikan oil-drop apparatus. The average size of the particles measured by the laser particle size analyzer is 3.311 μm. Based on the average particle size, the average charge of particles in the range of 3.2 μm and 3.4 μm is 6.4×10-17 C as measured by the Millikan oil-drop apparatus. This charge is the average charge of the particle group. -
表 1 密立根油滴仪所测微硅粉颗粒半径及带电量
电压UAB/V 运动时间t/s 颗粒半径rp/m 颗粒带电量qp/C 9 70 8.076×10-7 3.745×10-18 48 15.8 1.699×10-6 7.049×10-18 101 41.7 1.046×10-6 7.492×10-19 7 30.4 1.225×10-6 1.764×10-17 112 19.8 1.518×10-6 2.136×10-18 23 2.9 3.967×10-6 1.946×10-16 40 18.3 1.579×10-6 6.751×10-18 276 1.6 5.342×10-6 3.988×10-17 38 13.9 1.812×10-6 1.083×10-17 3 12 1.950×10-6 1.719×10-16 40 12.1 1.942×10-6 1.273×10-17 24 15.1 1.738×10-6 1.511×10-17 5 9.9 2.147×10-6 1.384×10-16 9 78.8 7.612×10-7 3.110×10-18 4 17.2 1.629×10-6 7.425×10-17 8 17.1 1.634×10-6 3.746×10-17 160 1.9 4.902×10-6 5.306×10-17 4 17.9 1.597×10-6 6.984×10-17 200 3.1 3.837×10-6 2.023×10-17 4 16.8 1.648×10-6 7.699×10-17 
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