Research of Influencing Factors in Machining of Ultrasonic Micro-hole via Air Floatation Load-matching
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摘要: 为探究加载力、超声功率百分比等因素对硬脆材料的旋转超声微细孔加工质量与效率的影响，采用正交试验设计法设计试验方案，以铁氧体和石英玻璃为工件材料，运用超声加工系统和具有加载力控制功能的气浮负载匹配系统进行旋转超声微细孔加工试验。分析并比较加载力、超声功率百分比、游离磨料等参数对不同材料加工后的微细孔直径和孔深的影响规律。试验结果表明，加载力过大会导致加工效率较低；加工过程中能量输入以声能为主；超声的影响区域略大于刀具本体；过大地游离磨料颗粒不易进入加工区域，过小颗粒无法携带足够能量，所以游离磨料直径过大或过小都会导致加工质量和效率都较低。Abstract: In order to explore the influence of the loading force and other factors on the quality and efficiency in the rotating ultrasonic micro-hole machining of hard and brittle materials, the ultrasonic machining system and air floatation load-matching system with loading force control function were used to conduct the rotating ultrasonic micro-hole machining experiments. Orthogonal experimental design method was used to design the scheme. Ferrite and quartz glass were used as workpiece materials. The influence laws of the loading force, ultrasonic power percentage and free abrasive on the diameter and depth of micro-holes on different materials were analyzed and compared. The results show that excessive loading force leads to low machining efficiency; energy input is mainly based on ultrasonic energy in machining; the influence area of the ultrasonic on the workpiece is slightly larger than the tool itself; too large free abrasive particles are not easy to enter the machining area, while too small particles cannot carry enough energy. Hence, too large or too small diameter of free abrasive will lead to low quality and efficiency in machining.
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表 1 试验方案设计
试验号 水平组合 试验条件 A/N B/μm C/% 1 A1B1C1 0.5 1 30 2 A1B2C2 0.5 3 50 3 A1B3C3 0.5 14 70 4 A2B1C2 0.7 1 50 5 A2B2C3 0.7 3 70 6 A2B3C1 0.7 14 30 7 A3B1C3 0.9 1 70 8 A3B2C1 0.9 3 30 9 A3B3C2 0.9 14 50 
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表 2 铁氧体微细孔直径
试验号 水平组合 试验条件 试验结果 A/N B/μm C/% 微细孔直径
X/mm1-1 A1B1C1 0.5 1 30 0.184 1-2 A1B2C2 0.5 3 50 0.193 1-3 A1B3C3 0.5 14 70 0.152 1-4 A2B1C2 0.7 1 50 0.265 1-5 A2B2C3 0.7 3 70 0.142 1-6 A2B3C1 0.7 14 30 0.130 1-7 A3B1C3 0.9 1 70 0.179 1-8 A3B2C1 0.9 3 30 0.109 1-9 A3B3C2 0.9 14 50 0.114 K1 － 0.529 0.628 0.423 － K2 － 0.537 0.444 0.572 － K3 － 0.402 0.396 0.473 － $ \overline{{{K}_{1}}}$ － 0.176 0.209 0.141 － $ \overline{ { {K}_{2} } }$ － 0.179 0.148 0.191 － $ \overline{{{K}_{3}}}$ － 0.134 0.132 0.158 － R － 0.045 0.077 0.050 －
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表 3 铁氧体微细孔孔深
试验号 水平组合 试验条件 试验结果 A/N B/μm C/% 微细孔孔深
Y/μm1-1 A1B1C1 0.5 1 30 102.51 1-2 A1B2C2 0.5 3 50 102.51 1-3 A1B3C3 0.5 14 70 94.69 1-4 A2B1C2 0.7 1 50 46.31 1-5 A2B2C3 0.7 3 70 57.66 1-6 A2B3C1 0.7 14 30 72.75 1-7 A3B1C3 0.9 1 70 37.90 1-8 A3B2C1 0.9 3 30 30.93 1-9 A3B3C2 0.9 14 50 40.02 $ {K_1 '} $ － 299.71 186.72 206.19 － $ {K_2 '} $ － 176.72 191.10 188.84 － $ {K_3 '} $ － 108.85 207.46 190.25 － $ \overline{K_1 '}$ － 99.90 62.24 68.73 － $ \overline{K_2 '}$ － 58.91 63.70 62.95 － $ \overline{K_3 '}$ － 36.28 69.15 63.42 － R' － 63.62 6.91 5.78 －
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表 4 石英玻璃微细孔直径
试验号 水平组合 试验条件 试验结果 A/N B/μm C/% 微细孔直径
X/mm2-1 A1B1C1 0.5 1 30 0.146 2-2 A1B2C2 0.5 3 50 0.189 2-3 A1B3C3 0.5 14 70 0.161 2-4 A2B1C2 0.7 1 50 0.134 2-5 A2B2C3 0.7 3 70 0.199 2-6 A2B3C1 0.7 14 30 0.151 2-7 A3B1C3 0.9 1 70 0.135 2-8 A3B2C1 0.9 3 30 0.093 2-9 A3B3C2 0.9 14 50 0.098 K1 － 0.496 0.415 0.390 － K2 － 0.484 0.481 0.421 － K3 － 0.326 0.41 0.495 － $ \overline{{{K}_{1}}}$ － 0.165 0.138 0.130 － $ \overline{{{K}_{2}}}$ － 0.161 0.160 0.140 － $ \overline{{{K}_{3}}}$ － 0.109 0.137 0.165 － R － 0.057 0.024 0.035 －
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表 5 石英玻璃微细孔孔深
试验号 水平组合 试验条件 试验结果 A/N B/μm C/% 微细孔孔深
Y/μm2-1 A1B1C1 0.5 1 30 9.85 2-2 A1B2C2 0.5 3 50 17.19 2-3 A1B3C3 0.5 14 70 18.24 2-4 A2B1C2 0.7 1 50 13.80 2-5 A2B2C3 0.7 3 70 22.09 2-6 A2B3C1 0.7 14 30 10.45 2-7 A3B1C3 0.9 1 70 13.77 2-8 A3B2C1 0.9 3 30 16.70 2-9 A3B3C2 0.9 14 50 12.21 $ {K_1 '} $ － 45.29 37.43 37.00 － $ {K_2 '} $ － 46.34 55.98 43.20 － $ {K_3 '} $ － 42.68 40.90 54.10 － $ \overline{K_1 '}$ － 15.10 12.48 12.33 － $ \overline{K_2 '}$ － 15.45 18.66 14.40 － $ \overline{K_3 '}$ － 14.22 13.63 18.03 － R' － 1.22 6.18 5.70 －
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表 6 试验结果分析
材料 衡量指标 最优结果 平均值 最优方案 加载力/N 游离磨料直径/μm 超声功率百分比/% 铁氧体 孔径 0.109 mm 0.163 mm 0.9 3 30 孔深 102.51 μm 65.03 μm 0.5 1或3 30或50 石英玻璃 孔径 0.093 mm 0.128 mm 0.9 3 30 孔深 22.09 μm 14.92 μm 0.7 3 70
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