Study on New Type of Straight Beam Flexure Hinge with Porous Structure
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摘要: 针对直梁型柔性铰链转动存在寄生位移难以实现微机电系统机构高精度运动应用，基于直梁圆角型柔性铰链，提出含平面对称孔隙或偏置孔隙结构、具有局部泊松比特征的新型柔性铰链。结合柔性铰链闭环柔度方程构造对标柔性铰链有限元计算模型；对具有相同孔隙率但不同组合形式孔隙的柔性铰链进行旋转柔度、回转精度及模态分析。结果表明，相同孔隙率下，对称布置孔隙铰链的柔度、中心回转精度均高于偏置孔隙铰链，其中3×3对称布置孔隙结构可将铰链自由端挠度提升20%，中心回转精度提高11.97%；孔隙结构柔性铰链自由端载荷与该端位移呈近似线性关系。本研究为多孔异构形式新型柔性铰链在特定精度与受多向力场合应用提供新思路。Abstract: Due to the parasitic displacement of the straight beam flexible hinge, it is difficult to get the high precision motion of the MEMS mechanism. A novel flexible hinge with plane symmetrical and offset porous characteristics is presented. The finite element calculation model for flexible hinge is established, and its feasibility and correctness is checked with the closed-form compliance equation. Compliance, precision and modal analysis of flexible hinges of same porosity but different combination are calculated. The results show that the porous structure enhances the compliance of hinges. With the same porosity, the compliance and rotation precision of the symmetrical pore characteristics hinge are higher than that of the offset pore hinge, and the 3×3 symmetric arrangement of the porous structure can improve the deflection of the hinge free end by 20%, the center rotation precision is improved by 11.97%. The relationship between the free-end load-displacement of the flexible hinge and the porous structure is approximately linear. Those results provides a new idea for applying the porous hinges to the specific precision, large rotation angle and multi-direction forces.
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Key words:
- flexible hinge /
- porous structure /
- compliance /
- rotation precision /
- finite element simulation
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表 1 对称布置负泊松比孔隙结构阵列构型
表 2 非对称布置孔隙负泊松比结构阵列构型
表 3 直梁圆角型柔性铰链有限元与结果
柔度因子 解析法 有限元法 偏差/% C11/rad 2.990 2.770 2.20 C12/(10-4N-1) 0.611 0.605 0.88 C22/(10-6N-1·m) 0.154 0.166 7.14 C33/(10-8N-1·m) 0.254 0.291 14.57 C′12/(10-4N-1) 0.127 0.145 12.67 C′22/(10-7N-1·m) 0.503 0.514 1.91 C′33/(10-8N-1·m) 0.135 0.126 6.26 
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表 4 不同孔隙结构的柔性铰链固有频率分析
Table 4.
Hz 模态 1st 2st 3st 4st 无孔 2 552 15 417 39 076 103 740 3×3组合孔 2 345 15 056 36 448 101 800
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