[1]
|
孙艳军, 冷雁冰, 陈哲, 等.用于红外焦平面的正方形孔径球面微透镜阵列研究[J].光子学报, 2012, 41(4):399-403 http://d.old.wanfangdata.com.cn/Periodical/gzxb201204005Sun Y J, Leng Y B, Chen Z, et al. Square aperture spherical microlens array for infrared focal plane[J]. Acta Photonica Sinica, 2012, 41(4):399-403(in Chinese) http://d.old.wanfangdata.com.cn/Periodical/gzxb201204005
|
[2]
|
孙豪, 起建立, 林泽钦, 等.球面上微透镜阵列超精密慢伺服加工精度影响因素的研究[J].光学精密工程, 2018, 26(10):2516-2526 http://d.old.wanfangdata.com.cn/Periodical/gxjmgc201810020Sun H, Qi J L, Lin Z Q, et al. Factors affecting the machining precision of a micro-lens array on a spherical surface in slow tool servo machining[J]. Optics and Precision Engineering, 2008, 26(10):2516-2526(in Chinese) http://d.old.wanfangdata.com.cn/Periodical/gxjmgc201810020
|
[3]
|
Schenk H, Grahmann J, Sandner T, et al. Micro mirrors for high-speed laser deflection and patterning[J]. Physics Procedia, 2014, 56:7-18 doi: 10.1016/j.phpro.2014.08.090
|
[4]
|
邢莎莎, 冉英华, 江海波, 等.基于微反射镜阵列的光刻照明模式变换系统设计[J].光学学报, 2015, 35(11):102-111 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=gxxb201511012Xing S S, Ran Y H, Jiang H B, et al. Illumination mode conversion system design based on micromirror array in lithography[J]. Acta Optica Sinica, 2015, 35(11):102-111(in Chinese) http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=gxxb201511012
|
[5]
|
谭鑫, 李文昊, 巴音贺希格, 等.紫外全息闪耀光栅的制作[J].光学精密工程, 2010, 18(7):1536-1542 http://d.old.wanfangdata.com.cn/Periodical/gxjmgc201007012Tan X, Li W H, Bayanheshig, et al. Fabrication of ultraviolet holographic blazed grating[J]. Optics and Precision Engineering, 2010, 18(7):1536-1542(in Chinese) http://d.old.wanfangdata.com.cn/Periodical/gxjmgc201007012
|
[6]
|
Kimura A, Gao W, Kim W, et al. A sub-nanometric three-axis surface encoder with short-period planar gratings for stage motion measurement[J]. Precision Engineering, 2012, 36(4):576-585 doi: 10.1016/j.precisioneng.2012.04.005
|
[7]
|
韩璐.箝位步进压电直线电机的研究[D].南京: 南京航空航天大学, 2016 http://cdmd.cnki.com.cn/Article/CDMD-10287-1016791802.htmHan L. Study on the clamping stepper piezoelectric linear motor[D]. Nanjing: Nanjing University of Aeronautics and Astronautics, 2016(in Chinese) http://cdmd.cnki.com.cn/Article/CDMD-10287-1016791802.htm
|
[8]
|
马立, 肖金涛, 周莎莎, 等.杠杆式尺蠖压电直线驱动器[J].光学精密工程, 2015, 23(1):184-190 http://d.old.wanfangdata.com.cn/Periodical/gxjmgc201501024Ma L, Xiao J T, Zhou S S, et al. Linear lever-type piezoelectric inchworm actuator[J]. Optics and Precision Engineering, 2015, 23(1):184-190(in Chinese) http://d.old.wanfangdata.com.cn/Periodical/gxjmgc201501024
|
[9]
|
Williams E, Loveday P, Theron N. Design of a large-force piezoelectric inchworm motor with a force duplicator[C]//20136th Robotics and Mechatronics Conference. Durban, South Africa: IEEE, 2013
|
[10]
|
Kroöger N, Schlobohm J, Poösch A, et al. Using refraction in thick glass plates for optical path length modulation in low coherence interferometry[J]. Applied Optics, 2017, 56(25):7299-7304 doi: 10.1364/AO.56.007299
|
[11]
|
钟相强, 黄卫清, 张轩, 等.二级杠杆柔性铰链复合结构的双足压电直线电机[J].光学精密工程, 2018, 26(1):86-94 http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=gxjmgc201801012Zhong X Q, Huang W Q, Zhang X, et al. Double-foot piezoelectric linear motor with secondary lever and flexure hinge composite structure[J]. Optics and Precision Engineering, 2008, 26(1):86-94(in Chinese) http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=gxjmgc201801012
|
[12]
|
连安志.步进式精密直线压电驱动器的设计与研究[D].西安: 长安大学, 2015 http://cdmd.cnki.com.cn/Article/CDMD-10710-1015802795.htmLian A Z. Design and research on a stepper precise linear piezoelectric actuator[D]. Xi'an: Chang'an University, 2015(in Chinese) http://cdmd.cnki.com.cn/Article/CDMD-10710-1015802795.htm
|
[13]
|
Sun X T, Chen W H, Zhang J B, et al. A novel piezo-driven linear-rotary inchworm actuator[J]. Sensors and Actuators A:Physical, 2015, 224:78-86 doi: 10.1016/j.sna.2015.01.024
|
[14]
|
Williams E, Loveday P, Theron N. Design of a large-force piezoelectric Inchworm motor with a force duplicator[C]//2013 6th Robotics and Mechatronics Conference. Durban, South Africa: IEEE, 2013
|
[15]
|
黄辉.圆柱形被动箝位式压电蠕动直线电机研究[D].哈尔滨: 哈尔滨工业大学, 2013 http://cdmd.cnki.com.cn/Article/CDMD-10213-1014001825.htmHuang H. Research of the passive clamp type cylindrical inchworm-type piezoelectric linear motor[D]. Harbin: Harbin Institute of Technology, 2013(in Chinese) http://cdmd.cnki.com.cn/Article/CDMD-10213-1014001825.htm
|