Experimental Investigation on Manufacturing of High-accuracy Hinge in Integration Sensor
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摘要: 精密电子天平对其传感器模块的机械性能要求极高，柔性铰链是影响传感器机械性能的关键因素，其加工难点在于完整、薄壁（最小壁厚小于0.1 mm）的金属连接，且多个铰链厚度一致性需控制在5 μm以内。目前，受制于传感器模块的制造技术，我国0.01 mg级电子天平仍然依赖进口，因此迫切需要开发柔性铰链精密加工技术，提升传感器模块制造技术。通过对比工艺试验研究，分析了铣削、铰削、镗削等多种工艺方法，优化了工艺参数，并实现了柔性铰链的稳定加工。Abstract: Precision electronic balances extremely require high mechanical properties of sensor modules. Flexible hinge is one key factor which has significant effects on mechanical properties of sensor modules. The main manufacturing difficulty of flexible hinge is to achieve a complete, very thin (minimum thickness is less than 0.1 mm) metal connection, and the thickness consistency of multiple hinges needs to be controlled below 5 μm. Limited by the manufacturing technology of sensor modules, the high-precision electronic balances at a scale of 0.01 mg in China still rely on import. Therefore, it is urgent to develop high-accuracy manufacturing method of flexible hinge, improve the manufacturing technology of sensor modules. In this paper, the different manufacturing experiments of flexible hinge were carried out, the advantages and disadvantages of milling, reaming and drilling were analyzed and compared, and the processing parameters are optimized. Finally, the flexible hinge was stably processed.
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Key words:
- sensor modules /
- flexible hinge /
- manufacturing technique /
- experimental investigation
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表 4 铣削、镗削、铰削铰链厚度测量对比
mm 名称 1 2 3 4 铣削 0.074 2 0.077 9 0.073 4 0.066 0.074 3 0.077 6 0.073 2 0.063 1 0.075 6 0.077 3 0.073 4 0.062 4 0.074 5 0.077 5 0.073 5 0.061 7 0.075 6 0.075 5 0.073 6 0.061 7 0.074 5 0.077 1 0.074 4 0.062 3 0.075 1 0.075 7 0.073 6 0.060 1 镗削 0.075 8 0.087 5 0.084 0.079 9 0.080 3 0.089 6 0.078 5 0.080 9 0.081 7 0.085 2 0.085 8 0.080 4 0.082 1 0.086 7 0.081 5 0.078 7 0.078 1 0.089 8 0.084 0 0.074 6 铰削 0.075 8 0.074 7 0.076 6 0.064 1 0.072 7 0.074 1 0.073 6 0.054 4 0.074 7 0.072 9 0.072 9 0.057 5 0.077 0 0.075 4 0.072 5 0.059 1 0.075 0.075 0 0.070 5 0.052 9 
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表 5 是否使用膨胀销对比
mm 条件 铣孔 镗孔 铰孔 使用 0.064 4 0.061 7 0.043 1 0.065 1 0.060 0 0.042 3 0.064 5 0.067 1 0.050 6 不用 0.0835 0.0841 0.0626
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