An Investigation on a Novel 3-PRC Compliant Parallel Micromanipulator
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摘要: 采用压电陶瓷作为驱动器设计了一种带有二级杠杆放大机构的3-PRC柔性并联微操作平台,该平台能实现空间三自由度的微小平移运动,放大机构的理论与有限元仿真分析放大倍数分别为8.772和8.245。首先采用矢量法建立了该机构的运动学模型,得到了其运动学正、逆解和雅克比矩阵。然后利用MATLAB软件分析并绘制了平台的工作空间,最后对机构的解耦性进行了理论分析并利用有限元软件进行了验证。结果表明该机构的耦合性误差小,可以实现空间三自由度微纳米级别的运动,具有较大的运动空间和良好的运动解耦性。Abstract: This paper proposes a structural design about 3-PRC compliant parallel micromanipulator integrated with a novel secondary lever amplification mechanism driven by piezoelectric actuator, which can realize translate motion along X/Y/Z axis, and the theoretical amplification ratio and the finite element simulation analysis magnification ratio of the secondary lever amplification mechanism are 8.772 and 8.245, respectively. The kinematics mathematical models are established with vector method, and the forward solution, inverse solution and Jacobian matrix are also derived at first. Then, the workspace of the stage is obtained by MATLAB and decoupling characteristics are analyzed and validated by finite element method. The result showed that the coupling error of the mechanism is small, and this 3-PRC micromanipulator can achieve micro/nano level motion with three degrees of freedom (mechanics).
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Key words:
- 3-PRC /
- structural design /
- mathematical models /
- MATLAB /
- finite element method /
- mesh generation
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