Aerostatic Bearing Design and study on Processing Technology for Key Parts
-
摘要: 气体静压主轴广泛地应用于精密、超精密机床设备中,其核心零件的加工精度是主轴性能优劣的重要影响因素。本文以自主设计的气体静压止推轴承为例,分析了典型制造误差对轴承承载力及刚度等性能的影响,以误差分析结果为基础给出静止推板的设计精度。对于亚微米精度要求的静止推板,针对其装夹微变形问题,提出了变形误差补偿车削原理,即在机床上按吸附变形误差的反误差进行加工,使静止推板在去除真空吸附后的自由状态下能达到高的面形精度。对∅188 mm的静止推板圆环面进行了补偿加工实验,面形误差快速收敛到1 μm以下,达到了高精度的加工要求。Abstract: The Aerostatic Spindle is widely used in the precision and ultra precision machinery, and the machining precision for key parts has a significant impact on the performance of the spindle. Taking the aerostatic thrust bearing designed by ourselves for an example, the effect which the typical manufacturing errors may have on the performance such as load capacity and stiffness of the bearing is analyzed. Based on the results of the error analysis, the design precision is defined. Considering the deformation of the static pushing plate caused by the vacuum suction with the requirement of submicron precision, a kind of error compensation cutting theory is put forward; in other words, the static thrust surface is machined to the opposite of the suction deformation error and the surface precision will be high when the vacuum suction is eliminated. An error compensation cutting experiment was carried out on the static push plate with the diameter of 188 mm and the error of the static thrust surface converged to 1μm below rapidly which meets the requirements of high machining precision for the static pushing plate.
-
[1] 赵午云,陶继忠.一种超精密空气静压车床主轴的设计[J].液压与气动,2012,(1):25-27 Zhao W Y, Tao J Z. Design of the ultra-precision aerostatic lathe spindle[J]. Chinese Hydraulics & Pneumatics, 2012,(1):25-27 (in Chinese) [2] 余鸿钧.流体静压主轴[M].北京:机械工业出版社,1985:498 Yu H J. The hydrostatic spindle[M]. Beijing: China Machine Press, 1985:498 (in Chinese) [3] 盖玉先,董申.超精密加工机床的关键部件技术[J].制造技术与机床,2000,(1):7-10 Gai Y X, Dong S. Technique for key components of machine tool for ultra-precision machining[J]. Manufacturing Technology & Machine Tool, 2000,(1):7-10 (in Chinese) [4] 姚英学,杜建军,刘暾,等.制造误差对气体静压轴颈-止推轴承静特性影响[J].哈尔滨工业大学学报,2003,35(3):315-318 Yao Y X, Du J J, Liu D, et al. Effect of manufacturing errors on static characteristics of externally pressurized gas journal-thrust bearings[J]. Journal of Harbin Institute of Technology, 2003,35(3):315-318 (in Chinese) [5] Stout K J. The effect of manufacturing variations on the performance of externally pressurized gas-lubricated journal bearings[J]. Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science, 1985,199(4):299-309 [6] 高岭,陈闽鄂,蒋晓刚.小型精密空气静压轴承的研制[J].精密制造与自动化,2009,(2):25-26 Gao L, Chen M E, Jiang X G. Development of a kind of small precision aerostatic bearing[J]. Precise Manufacturing & Automation, 2009,(2):25-26 (in Chinese) [7] Powell J W.空气静压轴承设计[M].丁维刚,林祥群,译.北京:国防工业出版社,1978:90-97,188-190 Powell J W. Design of aerostatic bearings[M]. Ding W G, Lin X Q, trans. Beijing: National Defence Industry Press, 1978:90-97,188-190 (in Chinese) [8] 郑子文.超精密机床伺服控制技术研究[D].长沙:国防科学技术大学,2001 Zheng Z W. Research on servo control techniques for ultra-precision machine[D]. Changsha: National University of Defense Technology, 2001 (in Chinese) [9] 刘家豪,傅建中,陈子辰.超精密加工的关键技术及发展趋势[J].机电工程,2001,18(5):19-21 Liu J H, Fu J Z, Chen Z C. The ultra-precision machining technology and it’s domestic and international progress[J]. Mechanical & Electrical Engineering Magazine, 2001,18(5):19-21 (in Chinese) [10] 杜金名,卢泽生,孙雅洲. 空气体静压轴承各种节流形式的比较[J].航空精密制造技术,2003,39(6):4-7,17 Du J M, Lu Z S, Sun Y Z. Comparision of all types of restriction for aerostatic bearings[J]. Aviation Precision Manufacturing Technology, 2003,39(6):4-7,17 (in Chinese) [11] 中国机械设计大典编委会.中国机械设计大典[M].南昌:江西科学技术出版社,2002:733 China Mechanical Design Canon Committee. China mechanical design canon[M]. Nanchang: Jiangxi Science & Technology Press, 2002:733 (in Chinese) [12] 成大先.机械设计手册.单行本:轴承[M].北京:化学工业出版社,2004:156-173 Cheng D X. Handbook of mechanical design. Separate edition: bearing[M]. Beijing: Chemical Industry Press, 2004:156-173 (in Chinese) [13] 丁振乾.流体静压支承设计[M].上海:上海科学技术出版社,1989:246-247 Ding Z Q. The design of hydrostatic support[M]. Shanghai: Shanghai Scientific and Technical Publishers, 1989:246-247 (in Chinese) [14] 李圣怡,戴一帆,王建敏,等.精密和超精密机床设计理论与方法[M].长沙:国防科技大学出版社,2009:173-208 Li S Y, Dai Y F, Wang J M, et al. The design theory and method for precision and ultra-precision machine tool[M]. Changsha: National University of Defense Technology Press, 2009:173-208 (in Chinese) [15] 王云飞.气体润滑理论与气体轴承设计[M].北京:机械工业出版社,1999:144-213 Wang Y F. Gas lubricated theory and design manual of gas bearings[M]. Beijing: China Machine Press, 1999:144-213 (in Chinese)
点击查看大图
计量
- 文章访问数: 255
- HTML全文浏览量: 37
- PDF下载量: 29
- 被引次数: 0