Design of Piezoelectric Precision Positioning Device based on Inertial Impaction
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摘要: 为了实现对负载纳米级的精密定位,提出了一种利用压电材料作为驱动元件的三驱动足精密定位装置。设计了基于惯性冲击原理的精密定位装置的结构,介绍了其具体工作过程,并对驱动足的工作过程进行了理论分析。制作样机并搭建了实验系统,采用显微镜物镜进行了定位性能的测试。实验结果表明:在锯齿波电压信号的驱动下,通过改变驱动电压信号的占空比,该精密定位装置能够实现所夹持负载的双向直线运动,当电压值为80 V;电压频率为80 Hz时,该装置的位移分辨率可以达到100 nm的精度,且运行平稳,工作性能良好,步距均匀,可以实现所夹持负载纳米级的定位要求。Abstract: In order to achieve nanometer level precision positioning of objects, this paper presents a three driven foot precision positioning device using piezoelectric material as the driving element. T the design principles of precision positioning device based on inertial impact is described, and its specific work process is introduced Then the mathematical analysis of the working process of driven foot is carried out. Made A prototype and experimental system is built and a microscope objective lens is used to test the positioning precision. The results show that by changing the duty cycle of the driving voltage signal, the precision positioning device is capable of bi-directional linear movement of the clamping load with the sawtooth signal as the driving voltage .When the voltage is 80V and the voltage frequency is 80 Hz, the precision positioning device can achieve the minimum resolution of 100 nm, and it works smoothly with good performance, meeting the requirement of nanometer-scale positioning.
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[1] 李环亭,孙晓红,陈志伟.压电陶瓷材料的研究进展与发展趋势[J].现代技术陶瓷,2009,30(2):28-32 Li H T, Sun X H, Chen Z W. The research progress and prospect of piezoelectric ceramic materials[J]. Advanced Ceramics, 2009,30(2):28-32 (in Chinese) [2] 荆丹,陶晓巍,李迎春.超精密柔性压电式微位移机构的研究[J].现代制造工程,2010,(12):133-136 Jing D, Tao X W, Li Y C. Study on ultra-precision flexible piezoelectric micro-motion mechanism[J]. Modern Manufacturing Engineering, 2010,(12):133-136 (in Chinese) [3] 孙宝玉,刘巨,岳晓峰,等.一种超精密压电式微位移机构研究[J].哈尔滨工业大学学报,2004,36(4):487-489 Sun B Y, Liu J, Yue X F, et al. Ultra precision micro-displacement mechanism based on piezoelectric actuator[J]. Journal of Harbin Institute of Technology, 2004,36(4):487-489 (in Chinese) [4] Lobontiu N, Goldfarb M, Garcia E. A piezoelectric-driven inchworm locomotion device[J]. Mechanism and Machine Theory, 2001,36(4):425-443 [5] 迟冬祥,颜国正,丁国清.基于惯性-摩擦原理的PZT驱动四自由度微驱动器的研究[J].光学精密工程,2001,9(2):135-138 Chi D X, Yan G Z, Ding G Q. Inertia-friction based 4 DOF microactuator driven by PZT[J]. Optic and Precision Engineering, 2001,9(2):135-138 (in Chinese) [6] 姜文锐,卢泽生.一种大行程高精度微执行器的研究[J].传感技术学报,2006,19(5):1555-1558,1562 Jiang W R, Lu Z S. A microactuator with high-resolution and large-stroke drive features[J]. Chinese Journal of Sensors and Actuators, 2006,19(5):1555-1558,1562 (in Chinese) [7] 陈兵芽,刘莹,胡敏,等.微执行器的研究与展望[J].微纳电子技术,2005,42(12):561-565 Chen B Y, Liu Y, Hu M, et al. The research and prospect of microactuator[J]. Micronanoelectronic Technology, 2005,42(12):561-565 (in Chinese) [8] 金家楣,时运来,李玉宝,等.新型惯性式直线超声压电电机的运动机理及实验研究[J].光学精密工程,2008,16(12):2371-2377 Jin J M, Shi Y L, Li Y B, et al. Research on novel inertial linear ultrasonic piezoelectric motor[J]. Optics and Precision Engineering, 2008,16(12):2371-2377 (in Chinese) [9] 曾平,温建明,程光明,等.新型惯性式压电驱动机构的研究[J].光学精密工程,2006,14(4):623-627 Zeng P, Wen J M, Cheng G M, et al. Research on novel inertial piezoelectric actuator[J]. Optics and Precision Engineering, 2006,14(4):623-627 (in Chinese) [10] 朱华,曹如意,菅磊.应用于干涉显微镜的直线压电作动器[J].光学精密工程,2013,21(6):1524-1530 Zhu H, Cao R Y, Jian L. Linear piezoelectric actuator applied to interference microscope[J]. Optics and Precision Engineering, 2013,21(6):1524-1530 (in Chinese) [11] Borodin S, Kim J D, Kim H J, et al. Nano-positioning system using linear ultrasonic motor with "shaking beam"[J]. Journal of Electroceramics, 2004,12(3):169-173 [12] Ueha S, Tomikawa Y, kurosawa M, et al. Ultrasonic motors: theory and applications[M]. Oxford: Oxford University Press, 1993 [13] 马立,谢炜,刘波,等.柔性铰链微定位平台的设计[J].光学 精密工程,2014,22(2):338-345 Ma L, Xie W, Liu B, et al. Design of micro-positioning stage with flexure hinge[J]. Optics and Precision Engineering, 2014,22(2):338-345 (in Chinese) [14] Hagedorn P, Sattel T, Speziari D, et al. The importance of rotor flexibility in ultrasonic traveling wave motors[J]. Smart Materials and Structures, 1998,7(3):352-368 [15] Uchino K. Piezoelectric actuators and ultrasonic motors[M]. Boston: Kluwer Academic Publishers, 1997
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