一种压阻式压力传感器稳健设计方法研究

李佳玮; 谭晓兰; 汪海涛

doi:10.13433/j.cnki.1003-8728.2015.0822

一种压阻式压力传感器稳健设计方法研究

doi: 10.13433/j.cnki.1003-8728.2015.0822

1.
北方工业大学机电工程学院, 北京 100144

基金项目:

国家自然科学基金项目（51375017）与北京市自然科学基金项目（3122014）资助

详细信息

作者简介:
李佳玮（1988-），硕士研究生，研究方向微传感器稳健设计， lijiawei8799@163.com

通讯作者:
谭晓兰，副教授，博士，硕士生导师，tanxiao2004@126.com

计量
- 文章访问数: 130
- HTML全文浏览量: 25
- PDF下载量: 7
- 被引次数: 0
出版历程
- 收稿日期: 2013-11-11
- 刊出日期: 2015-08-05

Research on Robust Design Method of a Piezoresistive Pressure Sensor

1.
College of Electromechnical Engineering, North China University of Technology, Beijing 100144, China

摘要

摘要: 利用ANSYS软件对膜片应力进行仿真分析，对得到的应力数据沿电阻条所在路径积分，计算出力敏电阻在外界压力下阻值的变化；将Taguchi方法应用到传感器的设计中，通过对力敏电阻尺寸及其位置参数进行分析，确定影响因素和水平，利用正交实验和信噪比分析参数的稳健性，最终选出性能最优的设计参数组合。此方法能够提高传感器的性能与质量。
- 压阻式压力传感器 /
- 灵敏度 /
- 仿真分析 /
- 路径积分 /
- Taguchi方法 /
- 信噪比
Abstract: ANSYS software is used to simulate and analyze the stress of the membrane, then integration along the path of resistance to calculate the changes of resistance with the result stress date. Taguchi robust design method will be applied in the design of the sensor, and the effect factors and levels were determined with analyzing the parameters of varisitor size and location. The orthogonal experiment design and signal to noise ratio were calculated to carry out the robustness of parameters. Finally, the optimal combination of parameters is selected. This method can improve the performance and quality of the piezoresistive pressure sensor.
- computer simulation /
- design of experiments /
- MEMS /
- optimization /
- path integration /
- piezoelectricity

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参考文献(15)

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