留言板

尊敬的读者、作者、审稿人, 关于本刊的投稿、审稿、编辑和出版的任何问题, 您可以本页添加留言。我们将尽快给您答复。谢谢您的支持!

姓名
邮箱
手机号码
标题
留言内容
验证码

大行程高精度驱动系统的研究

邢航 张铁民 杨秀丽 张建桃 漆海霞

邢航, 张铁民, 杨秀丽, 张建桃, 漆海霞. 大行程高精度驱动系统的研究[J]. 机械科学与技术, 2013, 32(6): 888-894.
引用本文: 邢航, 张铁民, 杨秀丽, 张建桃, 漆海霞. 大行程高精度驱动系统的研究[J]. 机械科学与技术, 2013, 32(6): 888-894.
Xing Hang, Zhang Tiemin, Yang Xiuli, Zhang Jiantao, Qi Haixia. Advances in Large-stroke and High-resolution Drive System[J]. Mechanical Science and Technology for Aerospace Engineering, 2013, 32(6): 888-894.
Citation: Xing Hang, Zhang Tiemin, Yang Xiuli, Zhang Jiantao, Qi Haixia. Advances in Large-stroke and High-resolution Drive System[J]. Mechanical Science and Technology for Aerospace Engineering, 2013, 32(6): 888-894.

大行程高精度驱动系统的研究

基金项目: 

国家自然科学基金项目(51177053)

广东省科技创新重点项目(2012CXZD0016)

高等学校博士学科点专项科研基金项目(20124404110003)资助

详细信息
    作者简介:

    邢航(1978-),讲师,博士研究生,研究方向为微机电测控系统设计和智能控制等,hangsail@163.com;张铁民(联系人),教授,博士,tm-zhang@163.com

    邢航(1978-),讲师,博士研究生,研究方向为微机电测控系统设计和智能控制等,hangsail@163.com;张铁民(联系人),教授,博士,tm-zhang@163.com

Advances in Large-stroke and High-resolution Drive System

  • 摘要: 首先对大行程高精度驱动系统结构研究进展进行介绍和评述,其次针对目前大行程高精度宏微两级定位系统结构复杂,体积大,驱动控制困难等问题,提出研究具有宏微双重运动功能的单一驱动结构将是大行程高精度驱动定位系统的发展方向;指出将超声电机与压电微驱动器结合成为单一驱动器将是大行程高精度驱动系统的一个发展方向;最后对单级超声电机宏微驱动系统建模方法、位置控制策略的研究进展进行了综述,指出了单级宏微驱动的超声电机研究的主要难点。
  • [1] Sharon A,Hogan N,Hardt D.Enhancement of robot accuracy u-sing endpoint feedback and macro-micro manipulator system[A].America Control Conference[C],1984:1836~1842
    [2] Sharon A,Hogan N,Hardt D.High bandwidth force regula-tion and Inertia reduction using a macro/micro manipulator system[A].IEEE International Conference on Robotics and Automation[C],1988,(1):126~132
    [3] Sang-soon Ku,Gary Larsen,Sabri Cetinkun.Fast tool servo con-trol for ultra-precision machining at extremely low feed rates[J].Mechatronics,1998,8(4):381~393
    [4] Heui Jae Pahk,Dong Sung Lee,Jong Ho Park.Ultra precision positioning system for servo motor-piezo actuator using the dual servo loop and digital filter implementation[J].International Journal of Machine Tools and Manufacture,2001,41(1):51~63
    [5] 张强,卢泽生等.宏/微结合双驱动进给控制系统的建模与仿 真研究[J].机械传动,2006,30(4):16~19
    [6] Elfizy A T,Bone G M,Elbestawi M A.Design and control of a dual-stage feed drive[J].International Journal of Machine Tools and Manufacture,2005,45(2):153~165
    [7] 刘红忠,丁玉成等.压印工作台的纳米级自找准定位研究[J].西安交通大学学报,2003,37(5):467~470
    [8] 孙绍云,曲东升,孙立宁等.宏/微驱动定位系统滑模变结构 控制的研究[J].机器人,2004,26(1):32~34
    [9] Jie D G,Sun L N,Liu Y J,Zhu Y H,Cai H G.Design and simulation of a macro-micro dual-drive high acceleration precision XY-stage for IC bonding technology[A].2005 6th Intenational Conference on Electonic Packing Techology[C],2005:161~165
    [10] Liu Y J,Li T,Sun L N.Design of a control system for a macro-micro dual-drive high acceleration high precision positioning stage for IC packaging[J].Science in China Series E:Technological Sciences,2009,52(7):1858~1865
    [11] Shinno H,Hashizume H,Sato H.Nanometer positioning of a linear motor-driven ultraprecision aerostatic table system with electrorheological fluid dampers[J].CIRP Annals-Manufac-turing Technology,1999,48(1):289~292
    [12] Mekid S.High precision linear slide.part I: design and construc-tion[J].International Journal of Machine Tools and Manu-facture,2000,40(7):1039~1050
    [13] Sriyotha P,Nakamaoto K,Sugai M.Development of 5-axis linear motor driven super-precision machine[J].CRIP Annals-Manu-facturing Technology,2006,55(1):381~384
    [14] 卢礼华,郭永丰等.高增益 PID 控制器实现纳米定位[J].光 学精密工程,2007,15(1):63~68
    [15] Dong W,Sun L N,Du Z J.Design of a precision compliant par-allel positioner driven by dual piezoelectric actuators[J].Journal of Sensors and Actuator A: Physical,2007,135(1):250~256
    [16] 莫岳平,胡敏强,金龙等.超声波电机振动模态有限元分析 [J].中 国电机工程学报,2002,22(11):92~96
    [17] Koc B,Bouchilloux P,Uchino K.Piezoelectric micromotor using a metal-ceramic composite structure[J].Ultrasonics,Ferroe-lectrics and Frequency Control,IEEE Transactions on,2000,47(4):836~843
    [18] Lamberti N,Iula A,Pappalardo M.A piezoelectric motor using flexural vibration of a thin piezoelectric membrane[J].Ultrason-ics,Ferroelectrics and Frequency Control,IEEE Transac-tions on,1998,45(1):23~29
    [19] 权哲浩,林玉池,赵美蓉等.大行程纳米级步进压电微动台的 特性研究[J].传感器与微系统,2008,27(2):39~45
    [20] Frangi A,Co rigiliano A,Binci M,Faure P.Finite element modeling of a rotating piezoelectric ultrasonic motor[J].Ultra-sonics,2005,43(9):747~755
    [21] Sun D,Liu J,Ai X.Modeling and performance evaluation of traveling-wave piezoelectric ultrasonic motors with analytical method[J].Sensors and Actuators A: Physical,2002,100 (1):84~93
    [22] Ming Y,Piewen Q.Performance Estimation of a rotary traveling wave ultrasonic motor based on two-dimension analytical model[J].Ultrasonics,2001,39:115~120
    [23] Fraysslgnes H,Briot H.Traveling wave ultrasonic motor: coupling effects in free stator[J].Ultrasonics,2003,41(4):89~95
    [24] 贺红林,曾劲松,龙玉繁等.行波超声电机的运转特性及其电 学建模研究[J].中国机械工程,2011,22(14):1639~1644
    [25] Mojallali H,Amini R,Izadi-Zamanabadi R,Jalali A A.System-atic modeling for free stators of rotary piezoelectric ultrasonic mo-tors[J].Mechatronics,IEEE/ASME Transactions on,2007,12(2):219~223
    [26] Senjyu T,Yokoda S,Gushiken Y,et al.Position control of ul-trasonic motors with adaptive dead-zone compensation[A].In-dustry Applications Conference[C],1998.Thirty-Third IAS Annual Meeting,1998,1:506~512
    [27] Senjyu T,Nakamura M,Urasaki N,et al.Mathematical model of ultrasonic motors for speed control[A].IEEE,Applied Pow-er Electronics Conference and Exposition[C],2006
    [28] 雷伏容,钟宜生,徐文立.行波型超声马达的数学模型[J].压 电与声光,2003,25(4):328~332
    [29] Valentinas S.Ultrasonic actutors for nanometer positioning[J].Ultrasonics,2000,38(1-8):20~25
    [30] 张建桃,张铁民,梁莉.超声电机非线性建模和广义预测控 制[J].电机与控制学报,2011,15(6):50~56
    [31] Bazrafshan F,Rasti B,Mojallali H.Fuzzy modeling and position control of a traveling wave ultrasonic motor[A].IEEE Internation-al Conference on Computer and Automation Engineering[C],2010:457~461
    [32] Jahani M,Mojallali H.Neural network based modeling of traveling wave ultrasonic motor using genetic algorithm[A].International Conference on Computer and Automation Engineering[C],2010:486~490
    [33] 张建桃,张铁民.超声电机伺服控制技术研究进展[J].电机 与控制学报,2009,13(6):879~885
    [34] Lin F J,Wai R J,Hong C M.Recurrent neural network control for LCC-resonant ultrasonic motor drive[J].IEEE Transactions on Ultrasonics,Ferroelectrics and Frequency Control,2000,47(3):737~749
    [35] Senjyu T,Kashiwagi T,Uezato K.Position control of ultrasonic motors using MRAC with dead-zone compensation[J].IEEE Transactions on Industrial Electronics,2001,48(6):1278~1285
    [36] Senjyu T,Yoshida T,Uezato K,et al.Position control of ultra-sonic motors using dead-zone compensation with fuzzy neural net-work[A].Power Electronics Specialist Conference,2003 IEEE 34th Annual[C],2003,4:1871~1876
    [37] Senjyu T,Yoshida T,Urasaki N,et al.Position control of ultra-sonic motors using two-control inputs H∞ controller[A].The Fifth International Conference on Power Electronics and Drive Systems[C],2003,1:269~274
    [38] 王心坚,胡敏强,金龙,徐志科.行波超声波电机多调节量协 调控制方法[J].中国电机工程学报,2009,29(6):73~79
    [39] Faa-Jeng L,Rong-Jong W,Mu-Ping C.Wavelet neural network control for linear ultrasonic motor drive via adaptive sliding-mode technique[A].IEEE Transactions on Ultrasonics,Ferroelec-trics and Frequency Control[C],2003,58(6):686~698
    [40] Takashi K,Keisuke S,Yukinori N,et al.High-speed positio-ning methods of an ultrasonic motor by input shaping filter and Bang-Bang control[A].SICE Annual Conference (SICE)[C],2011:1093~1098
    [41] 徐旭,梁艳春,时小虎.延时-回归神经网络及在超声马达控制 中的应用[J].电子学报,2004,32(11):1918~1921
  • 加载中
计量
  • 文章访问数:  73
  • HTML全文浏览量:  14
  • PDF下载量:  5
  • 被引次数: 0
出版历程
  • 收稿日期:  2012-03-01
  • 刊出日期:  2015-06-10

目录

    /

    返回文章
    返回