The Design and Properties of a Novel 4-DOF Compliant Parallel Mechanism
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摘要: 设计一种新型4自由度精密微动平台,并对其静态和动态特性进行分析。在传统4-RRUR并联机构的基础上,采用替换法设计具有解耦的柔顺并联机构。采用有限元软件ANSYS对机构进行刚度和运动学分析,分析结果表明所设计的平台具有解耦的X和Y方向平动,并能实现4自由度微动。对机构进行灵敏度分析表明该柔顺机构的各个方向的位移灵敏度约为6μm/μm,说明平台灵敏。对机构进行模态分析,从振型可以看出该机构能实现4自由度方向的运动,并分析了在有和无预应力两种情况下的固有频率,两者差值范围为17.2%~52.4%,说明预应力对机构的固有频率有较大影响。
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关键词:
- 柔顺并联机构 /
- 动态特性 /
- 4-RRUR并联机构 /
- 静态特性
Abstract: :A novel 4-DOF precision micro-stage was presented,and the static and dynamic characteristics were ana-lyzed. The substitution method was applied to design a decoupling compliant parallel mechanism based on the traditional 4-RRUR parallel mechanism. The ANSYS software was employed for the stiffness and kinematics analysis. The analysis results showed that the proposed state has the decoupled X and Y direction movement,and it can realize the 4-DOF mi-cro-motion. The results of the sensitivity analysis of the mechansm showed that the displacement sensitivity for each di-rection is about 6 μm/μm, and it illustrated the stage is sensitive. The modal analysis of the mechanism was carried out.It can seen that the stage can achieve 4-DOF movement from the mode shapes. The natural frequency was obtained in two cases with and without prestress,and the difference between the two cases is in the range of 17.2%~52.4%,thus it showed the prestress has a great influence on the natural frequency of mechanism.-
Key words:
- computer software|compliant parallel mechanism|4-RRUR parallel mechanism|degrees of freedom (mechanics)|design|dynamic performance|finite element method|Jacobian matrices|kinematics|matrix algebra /
- mechanismsmesh generationmodal analysinatural frequencies|prestressing|sensitivity analysis|static performance|stiffness /
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