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Articles:2017,Vol:22,Issue(2):84-90 |
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Citation: |
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ZHU Meng-nan, CAO Yun, ZHU Hui-jun. Several Applications of MEMS in Fluid Area[J]. International Journal of Plant Engineering and Management, 2017, 22(2): 84-90 |
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| Several Applications of MEMS in Fluid Area |
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| ZHU Meng-nan, CAO Yun, ZHU Hui-jun |
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| School of Energy and Power Engineering, Jiangsu University, Zhenjiang 212013, P. R. China |
| Abstract: |
| In order to discuss the several applications of MEMS in fluid area, study the components of MEMS. And introduce the principles, types and applications based on flow sensor and pressure sensor. In the last, discuss the problems when the sensors was applied in the fluid areas. |
| Key words:
MEMS
fluid
flow sensor
pressure sensor
applications
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| Received: 2017-02-20
Revised:
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| DOI: 10.13434/j.cnki.1007-4546.2017.0203 |
| Corresponding author:
Email： |
Author description: ZHU Meng-nan is an undergraduate in School of Energy and Power Engineering, Jiangsu University. His research interest is fluid machinery. zhumengnanreal@qq.com
CAO Yun is an undergraduate in School of Energy and Power Engineering, Jiangsu University. Her research interest is fluid machinery. 1196330353@qq.com
ZHU Hui-jun is an undergraduate in School of Energy and Power Engineering, Jiangsu University. Her research interest is fluid machinery. 1621461576@qq.com
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References: |
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[1] Luo Y Q. Fluid mechanics[M].3rd ed, Beijing:Mechanical Industry Press, 2007(in Chinese)
[2] Zhang J S, Yang C M. Fluid mechanics:Fluid mechanics and fluid mechanics[M]. 3rd ed, Jiangsu Xuzhou:China University of Mining and Technology Press, 2010,12,1(in Chinese)
[3] Yi L, Ou Y, Chen D P. MEMS technology in the application of fluid control[J]. Electronic Industry Special Equipment, 2007, 144(in Chinese)
[4] Wang W D. Study on the flow characteristics of micro fluid for MEMS design[D]. Xi'an:Xi'an Electronic and Science University, 2007(in Chinese)
[5] Wang H N. Development of self-priming micropump based on MEMS technology[D] Beijing:Chinese Academy of Sciences, 2006(in Chinese)
[6] Yi L. Fluid measurement and fluid control devices based on MEMS technology[D]. Shandong:Ji'nan University, 2008(in Chinese)
[7] Peng J G, Zhou Z Y, Ye W. Research progress of micro flow sensor based on MEMS technology[J]. Advances in Mechanics, 2005,35(3):1(in Chinese)
[8] Yousef H, Boukallel M, Althoefer K. Tactile sensing for dexterous in-hand manipulation in robotics-a review[J]. Sensors and Actuators A:Physical, 2011,167:171-187(in Chinese)
[9] Luo Y Q. Fluid mechanics[M]. 3rd ed, Beijing:Mechanical Industry Press, 2007,5:306-307(in Chinese)
[10] Ho C M, Tai Y C, Micro-electro-mechanical systems[J]. Annual Review of Fluid Mechanics,1998,579-612(in Chinese)
[11] Qin X X. MEMS sounding gas pressure sensor testing system design pressure[D]. Nanjing:Southeast University, 2015(in Chinese) |
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