ELID磨削预修锐与氧化膜成膜的影响因素

万林林; 罗晔; 邓朝晖; 李乐

doi:10.13433/j.cnki.1003-8728.20200028

ELID磨削预修锐与氧化膜成膜的影响因素

doi: 10.13433/j.cnki.1003-8728.20200028

万林林^{1, 2,},
罗晔^{1, 2},
邓朝晖^{1, 2},
李乐^{1, 2}

1.
湖南科技大学智能制造研究院, 湖南湘潭 411201
2.
难加工材料高效精密加工湖南省重点实验室, 湖南湘潭 411201

基金项目:

湖南省自然科学基金项目 2017JJ2092

国家留学基金湖南省地方合作项目 201808430275

湘潭市产业技术协同创新专项资金项目 C11811

详细信息

作者简介:
万林林(1984-)，副教授, 博士, 研究方向为工程陶瓷等难加工材料高效精密制造技术, wanlinlin@hnust.edu.cn

中图分类号: TP182
计量
- 文章访问数: 110
- HTML全文浏览量: 23
- PDF下载量: 17
- 被引次数: 0
出版历程
- 收稿日期: 2019-10-16
- 刊出日期: 2021-03-01

Influencing Factors of Pre-Dressing And Oxide Film Formation in ELID Grinding

WAN Linlin^{1, 2
,},
LUO Ye^{1, 2},
DENG Zhaohui^{1, 2},
LI Le^{1, 2}

1.
Institute of Intelligent Manufacturing, Hunan University of Science and Technology, Xiangtan 411201, Hu′nan, China
2.
Hunan Key Laboratory of High Efficiency and Precision Machining of Difficult-to-Machining Materials, Xiangtan 411201, Hu′nan, China

摘要

摘要: 设计了蓝宝石ELID(在线电解修整)磨削工艺的实验装置和实验方案。基于电化学理论，建立了蓝宝石ELID磨削预修锐氧化膜形成的数学模型，定性分析了氧化膜的成膜过程，并通过磨削实验，研究了极间间隙、电压等工艺参数对预修锐时间的影响规律，揭示了氧化膜厚度和生长速率的变化规律，提出了基于厚度、粘附力和孔隙率，并考虑预修锐时间的氧化膜状态的评价表征方法，对极间间隙、脉冲频率、电压和砂轮转速等ELID电解加工参数进行了优化。实验获得最佳加工条件为极间间隙0.5 mm，脉冲频率90 kHz，电压120 V，砂轮转速1 500 r/min。
- ELID磨削 /
- 预修锐 /
- 氧化膜 /
- 电解参数
Abstract: On the basis of the theory of electrochemistry, a mathematical model for the formation of oxide film in the ELID grinding of sapphire was established, and the process of oxide film formation was qualitatively analyzed. A series of sapphire ELID grinding experiments were carried out on a MGK71206X/F NC surface grinder, to further reveal the effects of the processing parameters such as interelectrode gap and voltage on the pre-dressing time as well as the variation of the oxide film thickness and growth rate. According to the experimental results, an evaluation method of oxide film state based on thickness, adhesion, porosity, and pre-dressing time was proposed to optimize the parameters such as the interelectrode gap, pulse frequency, voltage, and grinding wheel speed. The results showed that the optimal combination of parameters was at an interelectrode gap of 0.5 mm, a pulse frequency of 90 kHz, voltage of 120 V and grinding wheel speed of 1 500 r/min.
- ELID grinding /
- pre-dressing /
- oxide film /
- interelectrode parameters

HTML全文

图 1 ELID磨削加工机理^[12]

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图 2 预修锐电极间的示意图

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图 3 ELID实验装置

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图 4 电压对工作电流的影响

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图 5 极间间隙对工作电流的影响

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图 6 ELID预修锐实验时间结果

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图 7 氧化膜超景深图

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图 8 四因素对氧化膜厚度的影响

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图 9 四因素对粘附力的影响

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图 10 各参数对孔隙率的贡献率

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图 11 砂轮氧化膜的SEM图

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图 12 最优参数氧化膜的SEM图

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表 1 蓝宝石物理和机械性能参数

性能参数	数值
密度ρ/(kg·cm^-3)	3.98
弹性模量E/GPa	435
硬度H/GPa	18~20
断裂韧性KIC/(MPa·cm^1/2)	2.0
泊松比ν	0.27~0.29

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表 2 ELID磨削实验设备

实验设备	型号种类
平面磨床	MGK7120X6/F数控高精度卧矩台平面磨床
砂轮	金属结合剂金刚石砂轮(W3.5, W10)
电源	HDMD-V型ELID磨削专用电源
电解液	哈尔滨工业大学研制的ELID电解液
电极	圆弧黄铜电极
测量仪器	Taylor Hobson轮廓仪 LA-28霍尔电流传感器 A/D数据采集卡

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表 3 四因素三水平正交实验表

实验编号	极间间隙h_e/mm	脉冲频率f/kHz	电压U/V	砂轮转速ω/(r·min^-1)
1	0.5	5	60	600
2	0.5	50	90	1 500
3	0.5	90	120	2 400
4	1.0	5	90	2 400
5	1.0	50	60	600
6	1.0	90	120	1 500
7	1.5	5	120	1 500
8	1.5	50	90	2 400
9	1.5	90	60	600

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表 4 正交实验氧化膜孔隙率

实验编号	1	2	3	4	5	6	7	8	9
孔隙率/%	11.6	8.6	7.4	9.1	8.6	10.6	11.9	13.1	14.7

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参考文献(16)

[1]	万林林, 刘志坚, 邓朝晖, 等. 氮化硅陶瓷ELID磨削预修锐与氧化膜成膜的影响因素[J]. 金刚石与磨料磨具工程, 2017, 37(2): 55-61 https://www.cnki.com.cn/Article/CJFDTOTAL-JGSM201702014.htm WAN L L, LIU Z J, DENG Z H, et al. Influence factors of pre-dressing and oxide film forming when ELID grinding silicon nitride ceramic[J]. Diamond & Abrasives Engineering, 2017, 37(2): 55-61 (in Chinese) https://www.cnki.com.cn/Article/CJFDTOTAL-JGSM201702014.htm
[2]	KUAI J C, ARDASHEV D V, ZHANG H L. Study of α-Fe₂O₃ formation and its measurement in oxide films of wheel surface during ELID grinding process[J]. Modern Physics Letters B, 2017, 31(4): 1750025 doi: 10.1142/S0217984917500257
[3]	WANG Z Q, REN C Z, CHEN G, et al. A comparative study on state of oxide layer in ELID grinding with tool-cathode and workpiece-cathode[J]. The International Journal of Advanced Manufacturing Technology, 2018, 94(1-4): 1299-1307 doi: 10.1007/s00170-017-0931-8
[4]	OHMORI H, TAKAHASHI I, BANDYOPADHYAY B P. Ultra-precision grinding of structural ceramics by electrolytic in-process dressing (ELID) grinding[J]. Journal of Materials Processing Technology, 1996, 57(3-4): 272-277 doi: 10.1016/0924-0136(95)02079-9
[5]	KIM H Y, AHN J H, SEO Y H, et al. In-process measurement of ELID grinding status[J]. KSME International Journal, 2001, 15(9): 1268-1273 doi: 10.1007/BF03185667
[6]	YANG L J, REN C Z, JIN X M. Experimental study of ELID grinding based on the active control of oxide layer[J]. Journal of Materials Processing Technology, 2010, 210(13): 1748-1753 doi: 10.1016/j.jmatprotec.2010.06.005
[7]	徐志强, 尹韶辉, 姜胜强, 等. 在线电解修整磨削与化学机械抛光相结合的蓝宝石基片组合加工技术[J]. 中国机械工程, 2018, 29(11): 1310-1315 https://www.cnki.com.cn/Article/CJFDTOTAL-ZGJX201811009.htm XU Z Q, YIN S H, JIANG S Q, et al. ELID grinding and CMP compound processing technology for sapphire substrates[J]. China Mechanical Engineering, 2018, 29 (11): 1310-1315 (in Chinese) https://www.cnki.com.cn/Article/CJFDTOTAL-ZGJX201811009.htm
[8]	关佳亮, 戚泽海, 路文文, 等. 基于ELID磨削机理的GCr15轴承钢内圆工艺试验研究[J]. 组合机床与自动化加工技术, 2017(9): 110-113 https://www.cnki.com.cn/Article/CJFDTOTAL-ZHJC201709028.htm GUAN J L, QI Z H, LU W W, et al. Experimental study of GCr15 steel internal rings based on ELID grinding mechanism[J]. Modular Machine Tool & Automatic Manufacturing Technique, 2017(9): 110-113 (in Chinese). https://www.cnki.com.cn/Article/CJFDTOTAL-ZHJC201709028.htm
[9]	左明泽, 任成祖, 王志强. ELID沟道成形磨削氧化膜特性及影响作用实验[J]. 宇航材料工艺, 2017, 47(4): 42-47 https://www.cnki.com.cn/Article/CJFDTOTAL-YHCG201704009.htm ZUO M Z, REN C Z, WANG Z Q. Experimental on characteristics and effect of oxide layer in ELID groove profile grinding[J]. Aerospace Materials & Technology, 2017, 47(4): 42-47 (in Chinese). https://www.cnki.com.cn/Article/CJFDTOTAL-YHCG201704009.htm
[10]	吴涛. 蓝宝石单晶ELID磨削表面质量研究[D]. 秦皇岛: 燕山大学, 2006 WU T. surface quality study of sapphire crystal grinded by electrolytic in-process dressing (ELID) method[D]. Qinhuangdao: Yanshan University, 2006 (in Chinese).
[11]	BAFAKEEH O T, KHOSHAIM A B, MARINESCU I D. ELID fine grinding of sapphire rollers with emphasis on roughness and material removal rate[J]. Procedia Manufacturing, 2016, 5: 1249-1264. doi: 10.1016/j.promfg.2016.08.098
[12]	伍俏平, 郑维佳, 邓朝晖, 等. 在线电解修整磨削氧化膜研究现状及展望[J]. 中国机械工程, 2018, 29(17): 2023-2030 https://www.cnki.com.cn/Article/CJFDTOTAL-ZGJX201817002.htm WU Q P, ZHENG W J, DENG Z H, et al. Research status and perspectives of ELID grinding oxidation films[J]. China Mechanical Engineering, 2018, 29(17): 2023-2030 (in Chinese) https://www.cnki.com.cn/Article/CJFDTOTAL-ZGJX201817002.htm
[13]	胡瑞钦, 李勇. 电解加工参数对加工表面影响的理论建模与分析[J]. 电加工与模具, 2012(6): 38-42, 64 https://www.cnki.com.cn/Article/CJFDTOTAL-DJGU201206008.htm HU R Q, LI Y. Modeling and analysis for the effect of machining parameters on surface unevenness in ECM[J]. Electromachining & Mould, 2012(6): 38-42, 64 (in Chinese). https://www.cnki.com.cn/Article/CJFDTOTAL-DJGU201206008.htm
[14]	FATHIMA K, KUMAR A S, RAHMAN M, et al. A study on wear mechanism and wear reduction strategies in grinding wheels used for ELID grinding[J]. Wear, 2003, 254(12): 1247-1255. doi: 10.1016/S0043-1648(03)00078-4
[15]	彭蓉, 杨武霖, 符立才, 等. 低孔隙率阳极氧化铝膜的制备及其高绝缘特性[J]. 中国有色金属学报, 2018, 28(5): 964-970 https://www.cnki.com.cn/Article/CJFDTOTAL-ZYXZ201805013.htm PENG R, YANG W L, FU L C, et al. Preparation of anodic alumina films with low porosity and high insulation property[J]. The Chinese Journal of Nonferrous Metals, 2018, 28(5): 964-970 (in Chinese) https://www.cnki.com.cn/Article/CJFDTOTAL-ZYXZ201805013.htm
[16]	马胜利, 徐可为, 井晓天, 等. 阳极氧化条件对铝阳极氧化膜中孔洞形成的影响[J]. 热加工工艺, 1998(6): 38-40 https://www.cnki.com.cn/Article/CJFDTOTAL-SJGY199806016.htm MA S L, XU K W, JING X T, et al. Effect of anodizing conditions on the formation of pores in anodized aluminum film[J]. Hot working process, 1998(6): 38-40 https://www.cnki.com.cn/Article/CJFDTOTAL-SJGY199806016.htm