Technological Characteristics of NdFeB via Fiber Laser Micro-machining
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摘要: 为寻求一种新型高效的钕铁硼微加工手段,探究了光纤激光刻蚀1.5 mm厚的钕铁硼工艺实验,分析了各工艺参数对刻蚀深度、沟槽表面形貌和热影响区的影响规律。结果表明,刻蚀深度随激光功率的增大而增大,当激光功率为12 W时,深度增加到120.1 μm,随后其增长趋势逐渐趋于平缓。较低的激光频率,能获得较大的刻蚀沟槽深度,最大可达149.3 μm,但沟槽边缘形貌变差。适宜的低速刻蚀,不仅能获得较深的沟槽,而且还能保证材料去蚀量的同时,获得较好的边缘形貌和较小的热影响区。扫描次数增大到6次时,激光深度增大到139.5 μm,此时的沟槽槽壁挂渣最少,边缘形貌最佳。Abstract: In order to find an efficient micro-machining method of NdFeB, the experiment of fiber laser etching of NdFeB with a thinness of 1.5 mm is investigated. The effects of the various process parameters on the etching depth, groove surface morphology and heat affected zone are analyzed. The results show that the etching depth increases with the increasing of laser power. When the laser power is 12 W, the depth increases to 120.1 μm, and then the growth ratio decreases gradually. At lower laser frequencies, a larger etch trench depth can be obtained, up to 149.3 μm, but the trench edge topography is degraded. Suitable low-speed etching can not only obtain deep trenches, but also ensure the material's etching amount while obtaining better edge morphology and smaller heat affected zone. When the number of scans increases to 6 times, the laser depth increases to 139.5 μm. At this time, the trench groove wall has the least slag and the edge morphology is the best.
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Key words:
- laser etching /
- fiber laser /
- NdFeB /
- edge morphology
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表 1 钕铁硼的主要化学成分
元素 钕 铁 硼 镝 铌 铝 铜 含量/% 29~32.5 63.95~68.95 1.1~1.2 0.6~8 0.3~0.5 0.3~0.5 0.05~0.15 表 2 激光刻蚀工艺参数
工艺参数 数值 激光功率P/W 6, 8, 10, 12, 14, 16 激光频率f/kHz 30, 40, 50, 60, 70, 80 扫描速度v/(mm·s-1) 0.05, 0.1, 0.2, 0.4, 0.8, 1.2 扫描次数 1, 2, 4, 6, 8, 10 -
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