Numerically Simulating Static Pressure of Thrust Gas Bearing in Double-row Hole
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摘要: 为了给超精密设备的研制提供参数依据,建立双排孔静压止推气体轴承气膜模型,并结合理论验证其正确性,然后用Fluent进行仿真计算,找出了结构参数对轴承承载力及刚度的影响规律,最后进行了参数优化。Fluent仿真表明:仿真与理论吻合;当0.01 mm < h < 0.04 mm有均压腔的轴承的承载力及刚度大于无均压腔的;d越大,轴承的承载力越大,对应刚度的最大值越小;0.1 mm < h2 < 1.3 mm时对轴承的承载力及刚度无影响;当h < 0.018 mm时d1越大,轴承的承载力及刚度越大。参数优化结果表明:当h、h1都相同时d1与d同时取最大值时轴承的承载力最大。
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关键词:
- 双排孔静压止推气体轴承 /
- Fluent仿真 /
- 影响规律 /
- 参数优化 /
Abstract: To provide parameters for developing ultra-precision equipment, we establish the gas film model of a static thrust gas bearing in double-row hole. Then we simulate the model with the Fluent software to verify its correctness. We find out the influence law of structural parameters on the bearing capacity and stiffness of the thrust gas bearing. Finally we optimize the parameters. The simulation results show that when 0.01 mm < h < 0.01 mm, the bearing capacity and stiffness of an equal-pressure cavity are greater than those of a pressure cavity. The bigger the d, the greater the bearing capacity, the smaller the maximum stiffness. When 0.1 mm < h2 < 1.3 mm, there is no influence on the bearing capacity and stiffness of the thrust gas bearing; when h < 0.018 mm and d1 is larger, the greater the bearing capacity and stiffness of the thrust gas bearing. Its bearing capacity is the largest when h and h1 are all in phase and when the values of d1 and d are the largest.-
Key words:
- double-row hole /
- static pressure /
- thrust gas bearing /
- fluent software /
- simulation /
- parameter optimization
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表 1 正交实验表
mm 实验号 因素 d h2 d1 h1 D H 1 0.1 0.1 2 0.01 1 3 2 0.1 0.5 3 0.02 2 6 3 0.1 1 4 0.03 3 9 4 0.1 1.5 5 0.04 4 12 5 0.1 2 6 0.05 5 15 6 0.12 0.1 3 0.03 4 15 7 0.12 0.5 4 0.04 5 3 8 0.12 1 5 0.05 1 6 9 0.12 1.5 6 0.01 2 9 10 0.12 2 2 0.02 3 12 11 0.14 0.1 4 0.05 2 12 12 0.14 0.5 5 0.01 3 15 13 0.14 1 6 0.02 4 3 14 0.14 1.5 2 0.03 5 6 15 0.14 2 3 0.04 1 9 16 0.16 0.1 5 0.02 5 9 17 0.16 0.5 6 0.03 1 12 18 0.16 1 2 0.04 2 15 19 0.16 1.5 3 0.05 3 3 20 0.16 2 4 0.01 4 6 21 0.18 0.1 6 0.04 3 6 22 0.18 0.5 2 0.05 4 9 23 0.18 1 3 0.01 5 12 24 0.18 1.5 4 0.02 1 15 25 0.18 2 5 0.03 2 3 表 2 气膜的高度为0.008 mm时各统计量计算表
d h2 d1 h1 D H Kj1 11160.4 12014.7 10977.9 11360.4 11957.9 11935.8 K=59114.6 Kj2 11668.6 11860.6 11548.6 11876.5 11818.1 11908.9 Kj3 11950.9 11822 11937.8 12014.3 11836.4 11730.2 P=139781438 Kj4 12105.1 11708.9 12217.9 11962.6 11745 11833.3 Kj5 12229.6 11708.4 12432.4 11900.8 11757.2 11706.4 Q=140275171 Qj 139926265 139794300 140047433 139837236 139787200 139789920 Sj2 144827 12862 265995 55798 5762 8482 ST2=493733 表 3 气膜的高度为0.01 mm时各统计量计算表
d h2 d1 h1 D H Kj1 9661 11245 10366.2 10301.8 11131.3 11111.5 K=54596.3 Kj2 10574.3 10960.5 10770.5 10927.3 10944.1 11022.4 Kj3 11105.9 10860.6 11033.9 11174.8 10935.2 10796.8 P=119230239 Kj4 11491.8 10756.1 11140.5 11148.7 10802.3 10910.7 Kj5 11763.3 10774.1 11285.2 11043.7 10783.4 10754.9 Q=120058760 Qj 119785690 119262027 119335040 119333188 119245832 119248174 Sj2 555451 31788 104801 102949 15593 17935 ST2=828521 表 4 气膜的高度为0.012 mm各统计量计算表
d h2 d1 h1 D H Kj1 8089.6 10036.9 9467 9054.2 9921.8 9894.3 K=48686.8 Kj2 9169.1 9775.3 9687.1 9692.1 9820.9 9847.3 Kj3 9939.6 9649.9 9785 9990.2 9800.4 9655.7 P=94816180 Kj4 10517.1 9615.9 9810.7 10006.8 9592.9 9730.4 Kj5 10971.4 9608.8 9937 9943.5 9550.8 9559.1 Q=96073506 Qj 95858136 94842198 94840804 94945734 94836308 94831221 Sj2 1041956 26018 24624 129554 20128 15041 ST2=1257326 表 5 气膜的高度为0.014 mm时各统计量计算表
d h2 d1 h1 D H Kj1 6873.6 8839.5 8499.9 7959.1 8717 8709.6 K=42845.7 Kj2 7884 8606.3 8555.2 8510 8667.2 8643.4 Kj3 8721.2 8464.2 8555.2 8765.6 8640.5 8547.1 P=73430161 Kj4 9410.9 8496.9 8566 8823.4 8439.3 8521.5 Kj5 9956 8438.8 8669.4 8787.6 8381.7 8424.1 Q=74787458 Qj 74630027 73451699 73433209 73535483 73447872 73439967 Sj2 1199866 21538 3048 105322 17711 9806 ST2=1357297 表 6 气膜的高度为0.016 mm时各统计量计算表
d h2 d1 h1 D H Kj1 5993.8 7742.8 7576 7032.2 7650.4 7642.9 K=37674.1 Kj2 6838 7580 7538.5 7468.4 7625 7585.9 Kj3 7619.3 7436.6 7503.4 7677 7597.5 7544.8 P=56773513 Kj4 8319.1 7498.7 7483.3 7751.6 7443 7467.7 Kj5 8903.9 7416 7577.9 7744.9 7358.2 7432.8 Q=57952875 Qj 57844894 56787585 56774872 56847188 56786521 56779373 Sj2 1071381 14072 1359 73675 13008 5860 ST2=1179362 表 7 气膜的高度为0.018 mm时各统计量计算表
d h2 d1 h1 D H Kj1 5377.1 6854.2 6783.3 6277.5 6786.1 6777.3 K=33462 Kj2 6057 6740.9 6695.5 6640.5 6771.4 6719.6 Kj3 6724.9 6601.4 6647.3 6799.6 6736.5 6730.6 P=44788218 Kj4 7372.2 6685.1 6631.5 6868 6625.5 6611.3 Kj5 7930.8 6580.4 6704.4 6876.4 6542.5 6623.2 Q=45690186 Qj 45614330 44798099 44791049 44838421 44796999 44792372 Sj2 826112 9881 2831 50203 8781 4154 ST2=901968 -
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