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一种新型微操作平台的精确运动控制

胡俊峰 郝亚洲 徐贵阳 姚钱

胡俊峰, 郝亚洲, 徐贵阳, 姚钱. 一种新型微操作平台的精确运动控制[J]. 机械科学与技术, 2016, 35(2): 216-221. doi: 10.13433/j.cnki.1003-8728.2016.0210
引用本文: 胡俊峰, 郝亚洲, 徐贵阳, 姚钱. 一种新型微操作平台的精确运动控制[J]. 机械科学与技术, 2016, 35(2): 216-221. doi: 10.13433/j.cnki.1003-8728.2016.0210
Hu Junfeng, Hao Yazhou, Xu Guiyang, Yao Qian. Precision Motion Control of a Novel Micro-manipulation Stage[J]. Mechanical Science and Technology for Aerospace Engineering, 2016, 35(2): 216-221. doi: 10.13433/j.cnki.1003-8728.2016.0210
Citation: Hu Junfeng, Hao Yazhou, Xu Guiyang, Yao Qian. Precision Motion Control of a Novel Micro-manipulation Stage[J]. Mechanical Science and Technology for Aerospace Engineering, 2016, 35(2): 216-221. doi: 10.13433/j.cnki.1003-8728.2016.0210

一种新型微操作平台的精确运动控制

doi: 10.13433/j.cnki.1003-8728.2016.0210
基金项目: 

国家自然科学基金项目(51265016,51565016)与江西省科学基金项目(20122BAB216029)资助

详细信息
    作者简介:

    胡俊峰(1978-),副教授,博士,研究方向为柔顺机构及振动控制,hjfsuper@126.com

Precision Motion Control of a Novel Micro-manipulation Stage

  • 摘要: 设计一种具有2级放大的高精度微操作平台,建立压电陶瓷驱动的平台动态模型,采用PID控制策略综合平衡其性能。采用杠杆原理设计的2级放大机构,将平台设计为对称结构,提高了其运动精度。采用有限元法和振型截断法建立平台的传递函数,它可等效为一质量-阻尼-弹簧系统。将压电陶瓷驱动器的电气特性等效为RC电路,力学特性等效为具有一定柔度的器件,建立整个系统的开环传递函数和闭环传递函数。以综合平衡系统的动态性能和稳定性为目的设计PID控制器。结果表明,在PID控制器作用下,系统的相位裕度和幅值裕度均增大,提高了系统的稳态性能,但剪切频率减小,降低了系统的快速响应性。同时,系统的调节时间和超调量减小,提高了系统的平稳性。驱动器时间常数对微操作平台动态性能有较大的影响,时间常数选择于0.2 ms附近可以得到较小的调节时间和合适的超调量。
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出版历程
  • 收稿日期:  2014-01-05
  • 刊出日期:  2016-02-05

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