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精密主动减振器技术研究现状与进展

廖飞红 李小平 陈学东 袁志扬 李巍

廖飞红, 李小平, 陈学东, 袁志扬, 李巍. 精密主动减振器技术研究现状与进展[J]. 机械科学与技术, 2012, 31(9): 1411-1419.
引用本文: 廖飞红, 李小平, 陈学东, 袁志扬, 李巍. 精密主动减振器技术研究现状与进展[J]. 机械科学与技术, 2012, 31(9): 1411-1419.
Liao Fei-hong, Li Xiao-ping, Chen Xue-dong, Yuan Zhi-yang, Li Wei. Developments and Prospects of Active Vibration Isolator for Precision Equipment[J]. Mechanical Science and Technology for Aerospace Engineering, 2012, 31(9): 1411-1419.
Citation: Liao Fei-hong, Li Xiao-ping, Chen Xue-dong, Yuan Zhi-yang, Li Wei. Developments and Prospects of Active Vibration Isolator for Precision Equipment[J]. Mechanical Science and Technology for Aerospace Engineering, 2012, 31(9): 1411-1419.

精密主动减振器技术研究现状与进展

基金项目: 

国家自然科学基金项目(50605025)

国家973计划项目(2009CB724205)资助

详细信息
    作者简介:

    廖飞红(1983-),博士研究生,研究方向为精密运动控制,lfh159257@163.com;李小平(联系人),研究员,博士生导师,xpli@public.wh.hb.cn

    廖飞红(1983-),博士研究生,研究方向为精密运动控制,lfh159257@163.com;李小平(联系人),研究员,博士生导师,xpli@public.wh.hb.cn

Developments and Prospects of Active Vibration Isolator for Precision Equipment

  • 摘要: 环境振动直接降低精密制造和测量设备的动态性能,成为其性能的主要影响因素。主动减振器用于衰减地基振动和负载直接扰动,以维持精密设备的负载平台的稳定性。主动减振器按固有频率的差异,区分为软式主动减振器和硬式主动减振器。高刚性的硬式主动减振器衰减负载的直接扰动力和结构模态,低刚性的软式主动减振器能较好的隔离地基振动。论述两种类型主动减振器的结构技术的研究成果、研究进展和及其应用。针对精密设备发展对主动减振器的应用需求,对硬式主动减振器和软式主动减振器的结构技术的发展前景进行展望,指出其发展面临的挑战与有待解决的关键技术。
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  • 收稿日期:  2011-08-02
  • 刊出日期:  2015-06-10

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