精密主动减振器技术研究现状与进展

廖飞红; 李小平; 陈学东; 袁志扬; 李巍

精密主动减振器技术研究现状与进展

1.
华中科技大学数字制造装备与技术国家重点实验室, 武汉 430074;
2.
上海微电子装备有限公司, 上海 201203

基金项目:

国家自然科学基金项目(50605025)

国家973计划项目(2009CB724205)资助

详细信息

作者简介:
廖飞红(1983-)，博士研究生，研究方向为精密运动控制，lfh159257@163.com;李小平(联系人)，研究员，博士生导师，xpli@public.wh.hb.cn

廖飞红(1983-)，博士研究生，研究方向为精密运动控制，lfh159257@163.com;李小平(联系人)，研究员，博士生导师，xpli@public.wh.hb.cn

计量
- 文章访问数: 260
- HTML全文浏览量: 23
- PDF下载量: 7
- 被引次数: 0
出版历程
- 收稿日期: 2011-08-02
- 刊出日期: 2015-06-10

Developments and Prospects of Active Vibration Isolator for Precision Equipment

1.
State Key Laboratory of Digital Manufacturing Equipment and Technology, Huazhong University of Science and Technology, Wuhan 430074;
2.
Shanghai Micro Electronics Equipment Co.Ltd, Shanghai 201203

摘要

摘要: 环境振动直接降低精密制造和测量设备的动态性能,成为其性能的主要影响因素。主动减振器用于衰减地基振动和负载直接扰动,以维持精密设备的负载平台的稳定性。主动减振器按固有频率的差异,区分为软式主动减振器和硬式主动减振器。高刚性的硬式主动减振器衰减负载的直接扰动力和结构模态,低刚性的软式主动减振器能较好的隔离地基振动。论述两种类型主动减振器的结构技术的研究成果、研究进展和及其应用。针对精密设备发展对主动减振器的应用需求,对硬式主动减振器和软式主动减振器的结构技术的发展前景进行展望,指出其发展面临的挑战与有待解决的关键技术。
- 主动减振器 /
- 精密设备 /
- 硬式主动减振器 /
- 软式主动减振器
Abstract: Environment vibration directly leads to dynamic performance degradation and becomes one of key impact factors on the precision equipment performance. Active vibration isolator is used to damp the environment vibration both from base disturbance and direct disturbance in order to maintain the stability of the payload of precision equipment. Active vibration isolators are classified into hard mounts and soft mounts according to its natural fre-quency. Hard mounts are commonly used to damp direct disturbance and structure mode of the payload with their high stiffness while soft mounts are used to isolate the base disturbance. The technological prospects about struc-tures of both soft mounts and hard mounts are given and some challenges and unsolved key technologies for the structure of active vibration isolator are proposed.
- active vibration isolator /
- precision equipment /
- hard mounts /
- soft mounts

HTML全文

参考文献(64)

[1]	Heertjes M,Graaff K,Toorn J G.Active vibration isolation ofmetrology frames;a modal decoupled control design[J].Jour-nal of Vibration and Acoustics,2005,127(3):223～233
[2]	Amick H,Gendreau M,Busch T,et al.Evolving criteria for re-search facilities:vibration[A].Proceeding of SPIE Confer-ence 5933:Buildings for Nanoscale Research and Beyond[C],2005,San Diego,America.5933:1～13
[3]	Roozen N B,Philips P P H,Biloen D,et al.Active vibrationisolation applied to a magnetic resonance imaging(MRI)system[A].Twelfth International Congres on Sound and Vibration[C],July 11-14,Lisbon,Portugal
[4]	Gordon C G.Generic criteria for vibration-sensitive equipment[A].Proceedings of International Society for Optical Engi-neering[C],Nov.4-6,1991,San Jose,CA
[5]	Amick H,Gendreau M and Gordon C G.Facility vibration issuesfor nanotechnology research[A].Symposium on Nano DeviceTechnology[C],May.2-3,2002,National Chiao-Tung Uni-versity,Hsinchu,Taiwan
[6]	Integrated Dynamics Engineering.IDE Profile[E/OL].[2010].ht-tp://www.ideworld.com/aboutus/IDE-Image-sp.pdf
[7]	王加春,董申,李旦.超精密机床的主动隔振系统研究[J].振动与冲击,2000,19(3)
[8]	Yoshioka H,Takahashi Y,Katayama K,et al.An active mi-crovibration isolation system for hi-tech manufacturing facilities[J].Journal of Vibration and Acoustics,2001,123(2):269～275
[9]	Kimmenade J M M,Pal A,Eijk J.Positioning Device with aForce Actuator System for Compensating Center-of-gravityDisplacements,and Lithographic Device Provided with Sucha Positioning Device[P].The U.S.A Patent,5844664.1994-8-25
[10]	Mayama T,Takabayshi Y,Wakui S.Anti-vibration Appara-tus,Exposure Apparatus Using the Same,Device Manufac-turing Method,and Anti-vibration Method[P].The U.S.APatent,6322060.2001-11-27
[11]	Hara H.Anti-vibration System for Exposure Apparatus[P].The U.S.A Patent,6862077.2005-3-1
[12]	Loopstra E R,Heiland P.Supporting Device Provided with aGas Spring with a Gas Bearing,and Lithographic DeviceProvided with Such Supporting Devices[P].The U.S.A Pa-tent,6226075.1998-7-6
[13]	Phillips A H,Sakamoto H,Binnard M B.Vibration-attenuationDevices Having Low Lateral Stiffness,and Exposure ApparatusComprising Same[P].The U.S.A Patent,20040080729.2004-4-29
[14]	Aangenent W H T M,Criens C H A,Molengraft M J G,et al.LPVcontrol of an active vibration isolation system[A].2009 AmericanControl Conference[C] Jun,10-12,2009,St.Louis,USA
[15]	Boerlage M,Jager B,Steinbuch M.Control relevant blind identi-fication of disturbances with application to a multivariable activevibration isolation platform[J].IEEE Transactions on ControlSystems Technology,2010,18(2):393～404
[16]	Rademakers N G M.Modelling,Identification and Multivari-able Control of an Active Vibration Isolation System[M].Eindhoven University of Technology,2005
[17]	Dijk J.Mechatronic design of hard-mount concepts for precisionequipment[J].Motion and Vibration Control,2009,10:315～324
[18]	Poel G W.An Exploration of Active Hard Mount VibrationIsolation for Precision Equipment[D].Enschede:Universityof Twente,2010
[19]	Holterman J.Vibration Control of High-precision Machineswith Active Structural Elements[D].Enschede:Twente Uni-versity Press,2002
[20]	Mizuno T,Takemori Y.A unified transfer function approach tocontrol design for virtually zero power magnetic suspension[A].7th International Symposium on Magnetic Bearings[C],Aug23-25.2000.Swiss
[21]	Mizuno T,Takasaki M,Kishita D,et al.Vibration isolation sys-tem combining zero-power magnetic suspension with springs[J].Control Engineering Practice,2007,15(2):187～196
[22]	Hoque M E,Mizuno T,Ishino Y,et al.A six-axis hybrid vibra-tion isolation system using active zero-power control supported bypassive weight support mechanism[J].Journal of Sound andVibration,2010,329:3417～3430
[23]	Hua W S,Adhikari R,Debra D B,et al.Low-frequency activevibration isolation for advanced LIGO[A].Proceeding of theInternational Society for Optics and Photonics on Gravita-tional Wave and Particle Astrophysics Detectors[C],June23,2004,Glasgrow,United Kindom
[24]	Lei Z,Nayfeh S A.An integral sliding control for robust vibrationisolation and its implementation[A].Proceeding of the Inter-national Society for Optics and Photonics on Smart Struc-tures and Materials[C],Mar.18,2004,San Diego,USA
[25]	Lei Z,Nayfeh S A.Modified LMS feed-forward control for vibra-tion isolation with actuator limits[A].Proceeding of the Inter-national Society for Optics and Photonics on Smart Struc-tures and Materials[C],Mar 10,2005,San Diego,USA
[26]	Lei Z.Element and System Design for Active and Passive Vi-bration Isolation[D].Massachusetts:Massachusetts Institute ofTechnology,2005
[27]	Yan T H,Pu H Y,Chen X D,et al.Integrated hybrid vibrationisolator with feedforward compensation for fast high-precision po-sitioning X/Y tables[J].Measurement Science and Technolo-gy,2010,21(6)
[28]	Pu H Y,Luo X,Jiang W,et al.Modelling and control of hybridvibration isolation system for high-precision equipment[A].8thIEEE International Conference on Control and Automation[C],June 9-11.2010,Xiamen,China
[29]	Luo X,Pu H Y,Chen X D,et al.Study on a piezoelectric struc-ture based active vibration isolation system for high precision e-quipment[A].Acoustic Waves and Device Applications andChina Symposium on Frequency Control Technology[C],Dec 9-11.2009.Wuhan,China
[30]	Pu H Y,Luo X,Chen X D.Modeling and analysis of dual-chamber pneumatic spring with adjustable damping for precisionvibration isolation[J].Journal of Sound and Vibration,2011,3(5)
[31]	Pu H Y,et al.Six degrees-of-freedom active vibration isolationsystem with decoupled collocated control[A].Proceedings ofthe Institution of Mechanical Engineers,Part B:Journal ofEngineering Manufacture[C],2011
[32]	陈学东,蒲华燕,罗欣等.一种自适应变阻尼超精密减振器[P].中国专利,101818777,2010-09-01
[33]	陈学东,李小平,刘雷钧等.一种水平二自由度隔振机构[P].中国专利,101709763.2010-05-19
[34]	刘彦,谭久彬,王雷.差动电磁作动器的超大型光学仪器隔振基础的主动控制机理[J].光学精密工程,2007,15(10):1602～1608
[35]	邓习树.步进扫描光刻机模拟隔振试验平台主动隔振系统研究[D].长沙:中南大学,2007
[36]	Karnopp D C.Active and semi-active vibration isolation[J].Journal of Mechanical Design,1995,117(B)117～125
[37]	Karnopp D C,Trikh A K.Comparative study of optimizationtechniques for shock and vibration isolation[J].Transactionsof the ASME Journal of Engineering for Industry,1969,Series B,91:1128～1132
[38]	HANIEH A A.Active Isolation and Damping of VibrationsVia Stewart Platform[D].Brussels:University Libre de Brux-elles[D],2003
[39]	Beard A M,Schuber D W,Flotow A H.A practical product im-plementation of an active/passive vibration isolation system[J].Active Control of Vibration and Noise,1994,75:485～492
[40]	Schubert D W,Beard A M,Shedd S F,et al.Stiff ActuatorActive Vibration Isolation System[P].The U.S.A Patent,5660255.1994-4-4
[41]	Schubert D W,Beard A M,Shedd S F,et al.Stiff ActuatorActive Vibration Isolation System[P].The U.S.A Patent,5823307.1997-5-2
[42]	Nijsse G.A Subspace Based Approach to the Design,Imple-mentation and Validation of Algorithms for Active VibrationIsolation Control[D].Enschede:University of Twente,2006
[43]	Holterman J,Vries T J A.Active damping within an advancedmicrolithography system using piezoelectric smart discs[J].Mechatronics,2004,14:15～34
[44]	Holterman J,Vries T J A.Prediction and improvement of themaximum achievable damping with collocated control[A].10thInternational Congress on Sound and Vibration[C],July 7-10,2003,Stockholm,Sweden
[45]	Holterman J,Vries T J A.Active vibration control based on colloca-tion[A].8th Mechatronics Forum International Conference onMechatronics[C],June 24-26,2002,Enschede,Netherlands
[46]	Mizuno T,Takasaki M,Suzuki H.Application of zero-powermagnetic suspension to vibration isolation system[A].8th Inter-national Symposium on Magnetic Bearing[C],Aug 26-28,2002,Mito,Japan
[47]	Takemori Y.A transfer-function approach to the analysis and de-sign of zero-power controllers for magnetic suspension system[J].Electrical Engineering in Japan,2002,141(2):933～940
[48]	Preumont A,Horodinca M,Romanescu I,et al.A six-axis sin-gle-stage active vibration isolator based on stewart platform[J].Journal of Sound and Vibration,2007,300(3～5):644～661
[49]	Ibrahim R A.Recent advances in nonlinear passive vibration iso-latiors[J].Journal of Sound and Vibration,2008,314:371～452
[50]	Heertjes M,VAN-DE-WOUW N.Nonlinear dynamics and con-trol of a pneumatic vibration isolator[J].Journal of Vibrationand Acoustics,2006,128:439～448
[51]	Yasuda M,Itojima F.Method of Controlling Positions andVibrations And Active Vibration Control Apparatus There-fore[P].The U.S.A Patent,5121898.1990-7-24
[52]	Konkola P T.Design and Analysis of a Scanning Beam Inter-ference Lithography System for Patterning Gratings withNanometer-level Distortions[D].Cambridge:MassachusettsInstitute of Technology,2003
[53]	Teel A R,Zaccarian L,Marcinkowski J J.Active VibrationIsolation Systems with Nolinear Compensation to Accountfor Actuator Saturation[P].The U.S.A Patent,6511035.2003-1-28
[54]	Nelson P G.High Center of Gravity Stable Pneumatic Isola-tor[P].The U.S.A patent,6926263.2005-8-9
[55]	Yasuda M,Minbu S,PAN G Y,et al.Vibration Control Unitand Vibration Control Body[P].The U.S.A Patent,7278623.2002-7-30
[56]	Heiland P.Supporting Device for Supporting Vibration Sen-sitive Components[P].Europe,1744215.2007-1-17
[57]	Heiland P.Magnetic Spring Device with Negative Stiffness[P].The U.S.A Patent,7290642.2003-5-5
[58]	Robertson W S.A Study on Magnetic Systems for VibrationIsolation,with a Particular Emphasis on Using UnstableForces for Quasi-zero Stiffness[D].Adelaide:University ofAdelaide,2009
[59]	Robertson W S,Kidner M R,Cazzolato F B,et al.Theoreticaldesign parameters for a quasi-zero stiffness magnetic spring forvibration isolation[J].Journal of Sound and Vibration,2009,326(1,2):88～103
[60]	Robertson W S,Cazzolato F B,Zander A.A multipole arraymagnetic spring[J].IEEE Transactions on Magnetic,2005,41(10):3826～3828
[61]	Robertson W S,Cazzolato F B,Zander A.Nonlinear control of a oneaxis magnetic spring[A].14th International Congress on Soundand Vibration[C],July 9-12,2007,Cairns,Australia
[62]	Beadle B M,Hurlebaus S,S.t.obener U,et al.Modeling and pa-rameter identification of an active anti-vibration system[A].Proceeding of the International Society for Optics and Pho-tonics.International Symposia in Smart Structures&Mate-rials/NDE[C],Mar,2005,San Diego.America
[63]	王晓雷.气动隔振器及八作动器隔振平台控制问题研究[D].哈尔滨:哈尔滨工业大学,2008
[64]	David L P.Negative-stiffness-mechanism vibration isolation sys-tems[A].Proceeding of the International Society for Opticsand Photonics.Optomechanical Engineering and VibrationControl[C],July 1999,Denver.America